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Method for repairing damage of ceramic layer of dry etching component

A dry etching and repair method technology, applied in the field of dry etching, can solve the problems of long production time, increased handling and lifting process, and high cost, and achieves improved production efficiency, shortened production time, and strong local structure. Effect

Inactive Publication Date: 2019-02-05
芜湖通潮精密机械股份有限公司
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  • Summary
  • Abstract
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AI Technical Summary

Problems solved by technology

The production time is long, the cost is high, and a large number of handling and lifting processes are added, which increases the chance of new defects

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0012] Metal oxide ceramic Y2O3 has a purity of over 99.9%, a particle size of 63±10um, a hardness of up to (wear resistance) 6.0GPa, low dielectric loss, high plasma impedance, and excellent heat resistance, corrosion resistance, and chemical stability. ; Higher plasma erosion resistance performance, which is shown as excellent plasma resistance; the main purpose is for process chamber parts, and to make corresponding functional coatings according to different use environments.

[0013] Metal oxide ceramic Al2O3 has good mechanical strength; electrical insulation, high frequency loss; thermal conductivity and heat resistance, wear resistance; Al2O3 purity is more than 99.9%, dielectric layer hardness (wear resistance) 15.2GPa, corrosion resistance It is often used as a functional coating.

[0014] The high-performance epoxy resin liquid sealer product itself has suitable operating time, high fluidity and high permeability; after curing, it is resistant to yellowing, high and ...

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PUM

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Abstract

The invention discloses a method for repairing damage of a ceramic layer of a dry etching component. Damage of the ceramic layer comprises defective damage. The method is characterized in that when defective damage appears, an epoxy resin liquid hole sealing agent and Al2O3 powder are mixed according to a mass ratio of (2-3):1, the mixed solvent is applied to the defective damage part, and polishing and finishing are performed after the applied solvent cures. The method is a quick and convenient local improvement method, and has the beneficial effects that powder particles are sufficiently wrapped by liquid glue, the liquid glue and the powder particles are intertwined, so a hardened structure is compact, damage is repaired, internal defects are eliminated and a local structure is more solid, thereby greatly reducing a big amount of cost of comprehensive renovation, shortening the preparation time, reducing consumption of energy sources and manpower, and improving the production benefit of corporations.

Description

technical field [0001] The invention relates to the field of dry etching, in particular to a method for repairing damage to a ceramic layer of a dry etching component. Background technique [0002] The main equipment for dry etching is divided into upper electrode and lower electrode, as well as ceramic parts and aluminum alloy wall parts. Due to the hard, brittle and dense structure of ceramics, during the process of handling, transportation, installation and unloading, ridges and corners will inevitably be damaged by contact extrusion, vibration, collision, etc., which will cause poor appearance , and even lead to abnormal functional properties. The structure of the lower electrode is more complicated, there are a large number of ceramic bonds on the substrate, and the overall structure is a sandwich structure. On the upper part of the stainless steel or aluminum substrate, there are, from bottom to top, the first insulating layer and the conductive layer. , the second in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B41/50C04B41/85
CPCC04B41/5031C04B41/85C04B41/4853C04B41/4539
Inventor 黄艳芳
Owner 芜湖通潮精密机械股份有限公司
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