Drying device for optical polishing wafers
A technology of drying device and polishing sheet, which is applied in the direction of drying, drying machine, drying gas arrangement, etc. It can solve the problems of poor drying efficiency, affecting processing quality, scratches on the polished surface, etc., and achieves avoiding scratches, good Protective effect, good isolation effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments of the present invention belong to the protection scope of the present invention.
[0024] According to an embodiment of the present invention, a drying device for an optical polishing sheet is provided.
[0025] Such as Figure 1-4 As shown, a drying device for optical polishing sheets according to an embodiment of the present invention includes a drying box 1, one side of the drying box 1 is provided with a box door 2, and the other side of the drying box 1 is Several driving motors 7 are provided, a heating blower 8 is arranged on the top of the drying box 1, and an air ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com