A Method of Controlling Free Layer Domain Structure to Realize Ten-state Data Storage in Magnetic Tunnel Junction
A magnetic tunnel junction and data storage technology, which is applied in the data storage field of information technology, can solve the problems of difficulty in meeting high-density storage, reduced coercivity, and large device size, and achieves good application prospects, improved performance, and high density. Effect
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[0036] A method for controlling free layer domain structure to realize ten-state data storage in a magnetic tunnel junction, comprising:
[0037] (1) In a clean, 300nm thick SiO 2 Ta 3 / CuN 10 / Ta 5 / Ru 5 / IrMn 8 / CoFe 2.5 / Ru 0.85 / CoFeB 3.0 / MgO 0.5- 3 / CoFeB 2.5 / Ta 8 / Cu 10 / Ru 5 magnetic tunnel junction. The numbers represent the thickness of each layer in nanometers. The background vacuum of the preparation instrument is better than 10- 8 millibar. The prepared samples were annealed at 360°C for 2 hours. During the annealing process, an induced magnetic field of 8000 Oersted was applied along the surface of the sample, in order to make the IrMn have a good antiferromagnetic order, so that it can play a pinning role. Cylindrical magnetic tunnel junctions with a diameter of 6 μm were fabricated by photolithography, reactive etching, and lift-off techniques.
[0038] (2) Using a superconducting quantum interference magnetometer, measure the magnetic properties of a tunnel junction ...
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