Annular shear type deflection electric acceleration sensor and laminated structure acceleration sensor

Abstract

The invention discloses an annular shear type deflection electric acceleration sensor and a laminated structure acceleration sensor. The annular shear type deflection electric acceleration sensor comprises a support rod, output terminals, an annular mass block and an annular sensing module made of a deflection dielectric material; the inner ring and the outer ring of the annular sensing module areplated with a metal film; the inner ring of the annular sensing block is arranged at the upper end of the support rod; the inner ring of the annular mass block is fixed at the outer ring of the annular sensing block; and the metal films of the inner ring and the outer ring of the annular sensing block are connected with two output terminals respectively through wires. As the acceleration is measured by using a linear relationship between a strain gradient which is generated by the deflection dielectric material along the axial direction and electric charge which is generated based on the deflection electric effect under the action of a shearing stress generated by the annular mass block, measurement of vibration is accordingly realized.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an annular shear type flexoelectric acceleration sensor and a laminated annular shear type flexoelectric acceleration sensor. Background technique [0002] The piezoelectric effect is the linear coupling of stress and electrical polarization, and is usually described as the phenomenon of charge generation following the application of pressure to a crystal. The traditional piezoelectric acceleration sensor is made by using the phenomenon that some dielectric materials have piezoelectric effect after being stressed. Although piezoelectric materials have superior electromechanical conversion effects, there are also some disadvantages: First, in terms of the selection of dielectric materials, although many dielectric materials have good electromechanical coupling characteristics, such as PMNT, PZT, etc., they are not Because they contain heavy metals such as lead, they are easy to p...

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Problems solved by technology

However, once the base material of the ladder-shaped structure pressure sensor undergoes a phase change, it will seriously affect the accuracy of the test, while the cantilever beam structure pressure sensor has poor stability and is not resistant to high temperature

In addition, these two types of structural sensors are not convenient to be designed as acceleration sensors with small g values ​​due to weak electrical signals for excitation.

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