Vacuum motor

A technology for vacuum motors and motor chambers, which is applied in mechanical equipment, machines/engines, liquid fuel engines, etc. It can solve the problems of not being used in IC equipment, high power consumption, and low ultimate vacuum, so as to achieve long service life and energy saving and space, the effect of reducing the coefficient of friction

Inactive Publication Date: 2018-12-21
FUSHUN COAL MINE MOTOR MFG
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the shortcomings of low ultimate vacuum, high power consumption, large volume, and inability to be used in IC equipment in the existing Roots pump technology, the present invention provides a Roots vacuum motor, a new type of Roots dry pump suitable for IC equipment

Method used

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Embodiment Construction

[0016] like Figure 1-Figure 4 As shown, the present invention includes a shaft end fixing nut 1, a motor side bearing gland 2, a motor side driven oil slinger 3, a bearing 4, a bearing support ring 5, a shaft seal ring 6, a bearing cavity 7, and a double-lip shaft seal 8 , Roots cavity 9, driven rotor shaft 10, driving rotor shaft 11, sealing ring 12, sealing ring 13, gear cavity 14, gear side bearing gland 15, gear side driven oil thrower 16, driven gear 17 , driving gear 18, rectangular sealing ring 19, active oil throwing pan 20, motor cavity 21, motor sealing ring 22, driving shaft sleeve 23, rotor shaft shielding variable frequency motor 24, motor rotor 25, oil and gas separation device 26, roots cavity 9. The bearing cavity 7 and the gear cavity 14 are installed at both ends. The bearing 4, the bearing support ring 5, and the double-lip shaft seal 8 are installed in the bearing cavity 7 bearing seat and the gear cavity bearing cavity bearing seat in turn, and the motor ...

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Abstract

The invention discloses a vacuum motor. The vacuum motor comprises a motor cavity, a bearing cavity, a Roots cavity, a gear cavity, a motor, a driving rotor shaft, a driven rotor shaft, a driven gear,a driving gear, a driving Roots rotor and a driven Roots rotor; the motor is characterized in that the bearing cavity and the gear cavity are arranged on the two sides of the Roots cavity, the motorcavity is connected with the bearing cavity, shaft seal devices are arranged between the bearing cavity and the Roots cavity and between the Roots cavity and the gear cavity, the motor is small in size, large in pulling speed and capable of saving energy and space, due to frequency control, the service life is long, a Teflon dual-lip shaft seal is adopted, the maintaining period of a pump is prolonged, an oil and gas separation device is adopted, the leakage problem of oil steam to a vacuum chamber is solved, the structure that a motor rotor and a pump shaft are integrated, and a motor statoris arranged outside an oil chamber is adopted, the problems of motor dynamic seal and motor vibration are solved, a heat expansion assembling structure is adopted in gear assembling, and unbalance andvibration of a motion part are reduced.

Description

technical field [0001] The invention relates to the technical field of a vacuum motor, in particular to a vacuum motor. Background technique [0002] Roots vacuum motor is evolved from Roots blower, including high vacuum multi-stage Roots pump, medium vacuum Roots booster pump and dry Roots pump with direct exhaust air, which are widely used in chemical industry, papermaking, metallurgy, film preparation , food and other industries, but also a vacuum motor commonly used in the IC equipment industry. The domestic research and manufacture of Roots vacuum motor is earlier, but the Roots dry pump suitable for the strict requirements of the IC equipment industry is rare, resulting in the long-term dependence of this equipment on imports. [0003] The air-cooled Roots dry pump meets many requirements of the IC equipment industry, such as high working temperature, long-term stable operation, low noise, simple maintenance, clean and oil-free, etc. It is a dry low vacuum motor with ...

Claims

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Application Information

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IPC IPC(8): F04C25/02F04C18/12F04C27/00F04C29/00F04C29/02F04C29/04
CPCF04C25/02F04C18/126F04C27/005F04C29/0085F04C29/02F04C29/026F04C29/045
Inventor 康烁
Owner FUSHUN COAL MINE MOTOR MFG
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