Super-resolution three-dimensional shape measurement method based on optical tweezers dielectric microspheres

Abstract

The invention discloses a super-resolution three-dimensional shape measurement method based on optical tweezers dielectric microspheres. The dielectric microspheres are taken as a core, an optical tweezers principle is adopted for controlling the dielectric microspheres in an array mode, a three-dimensional space position of the dielectric microspheres is flexibly controlled, and an optimal imaging effect is obtained. Meanwhile, DMD projection sinusoidal grating stripes are used for encoding a dielectric microsphere imaging space, light field distribution characteristics of the dielectric microsphere imaging space are utilized, and a dielectric microspheres coded image modulated by a to-be-measured structure is resolved, so that transverse graph correction and longitudinal height reconstruction are achieved. According to the method, three-dimensional shape measurement of micro-nano devices with the characteristic dimension of less than 100 nm can be realized in a far-field region through a face imaging mode, and meanwhile, the method has the advantages of high flexibility, high resolution, parallelism, fast measurement and the like.

Description

technical field [0001] The invention belongs to the technical field of optical measurement engineering, and in particular relates to a super-resolution three-dimensional shape measurement method based on optical tweezers dielectric microspheres. Background technique [0002] Micro-nano devices utilize micron or even nanometer-scale characteristic structures, which can break through the functional and performance limitations of traditional macrostructures, and are international research frontiers and hotspots. The research level of micro-nano devices has become an important symbol to measure the level of science and technology of a country. The research process of micro-nano devices is inseparable from precise surface shape detection. As the final output of the design stage, the surface shape can not only detect the processing quality of the device, but also ensure that the processing meets the design requirements. More importantly, through high-precision detection of surfa...

AI Technical Summary

Problems solved by technology

At present, there are still many problems in the use of dielectric microspheres for 3D measurement: the measurement field of view is narrow, and the image is distorted; the microspheres are placed directly on the surface of the sample, and the best imaging quality cannot be obtained; most of them are used for 2D measurement

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