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Liquid float polishing method taking non Newtonian power law fluid as polishing medium

A power-law fluid and polishing medium technology, applied in the field of ultra-smooth surface polishing of optical components, can solve the problems of large equipment investment, low polishing efficiency, low removal efficiency, etc. Efficient effect

Inactive Publication Date: 2018-11-30
XIAN TECHNOLOGICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for jet abrasive particles, the sputtering and energy loss are serious after impacting the surface of the workpiece, and its polishing feature is point polishing, and the polishing efficiency is low.
[0006] Ion beam polishing uses charged high-energy atoms or ions as the polishing medium, which is shot from an ion gun to the workpiece in a vacuum environment, and the surface material of the workpiece is sputtered off the surface of the workpiece under the bombardment of the ion beam, which is achieved on the atomic scale. Therefore, the removal efficiency of the material is low, but the equipment investment required for ion beam milling is large, and the operating cost is high

Method used

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  • Liquid float polishing method taking non Newtonian power law fluid as polishing medium
  • Liquid float polishing method taking non Newtonian power law fluid as polishing medium
  • Liquid float polishing method taking non Newtonian power law fluid as polishing medium

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Configure a certain amount of non-Newtonian power law fluid shear thickening polishing liquid, set the grinding head pressure as M=40kg, the mass fraction wt% of cerium oxide in the polishing liquid (CeO 2 )=14%, the mass fraction wt% of silicon dioxide (SiO 2 )=9%, the remainder is polyethylene glycol; the SiO 2 The average particle size is about d 1 =12nm, CeO 2 The average particle size is d 2 =5um, the inlet pressure is set to 0.5MPa. The workpiece is made of K9 glass, and the diameter of the workpiece is D 工件 =150mm, the diameter of the polishing surface of the grinding head is D 磨头 =150mm, the polishing time of the workpiece is set to 3h (the time interval for measuring the surface of the workpiece is 1h). Use this method to polish, and use the newview8000 white light interferometer of ZYGO Company to detect the roughness of the workpiece surface for the initial and processed workpieces at different times.

[0029] see image 3 , image 3 (a) The picture ...

Embodiment 2

[0031] Configure a certain amount of non-Newtonian power law fluid shear thickening polishing liquid, set the grinding head pressure as M=40kg, the mass fraction wt% of cerium oxide in the polishing liquid (CeO 2 )=18%, the mass fraction wt% of silicon dioxide (SiO 2 )=9%, the remainder is polyethylene glycol. Use this method to size diameter D 工件 =150mm K9 glass for polishing.

Embodiment 3

[0033] When setting the dispersed phase silica mass fraction wt% (SiO 2 )=9%, abrasive cerium oxide mass fraction wt% (CeO 2 )=18%, the remainder is polyethylene glycol. The inlet pressure is set to P 入 =0.3MPa, the grinding head pressure M=34.3kg, the workpiece polishing time is set to 90min (the time interval for measuring the workpiece surface is 30min). The initial and processed workpieces at different times are tested with ZYGO's newview8000 white light interferometer to detect the surface roughness of the workpiece.

[0034] Here, 9 different points on the workpiece are selected for detection, and the test results are as follows: Figure 4 As shown, the initial roughness has a significant decline, and has reached saturation in the later stage.

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Abstract

The invention relates to the technical field of polishing of super smooth surfaces of optical elements, in particular to a liquid float polishing method taking a non Newtonian power law fluid as a polishing medium. Optical glass is processed with high efficiency, high quality and low cost. According to the technical scheme, the device comprises a pipeline, a polishing head which supplies a liquidin the middle and a worktable. The pipeline conveys a polishing liquid to the center of the polishing head, the polishing liquid is guided into the polishing head through a hydraulic pump and flows through a polishing area between the polishing head polishing surface and a processed workpiece on the worktable, a liquid film formed by the fluid in the polishing area supports the polishing head, thepolishing head achieves a self-balanced state under the action of the liquid, the liquid flows at a certain speed in the polishing area, the fluid has a shear thickening phenomenon under the action of the shearing force, solid particles wrap the polishing particles therein to form a flexible solid abrasive material so as to form a solid-like shape to shear a protruding peak on the processed workpiece, so that the surface of the workpiece is removed.

Description

Technical field: [0001] The invention relates to the technical field of ultra-smooth surface polishing of optical elements, in particular to a liquid floating polishing method using a non-Newtonian power-law fluid as a polishing medium. Background technique: [0002] With the rapid development of the global economy and the advancement and breakthrough of science and technology, the processing and manufacturing of optical components has also achieved good results, especially for today's aerospace manufacturing, national defense and military industry, astronomical exploration, and civilian enterprises. All indicators have put forward higher and higher requirements. How to achieve high-efficiency, high-quality, and low-cost processing of optical components is the goal pursued in the field of ultra-precision processing. [0003] At present, based on the traditional processing foundation, relatively mature ultra-precision processing technologies have emerged, such as magnetorheo...

Claims

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Application Information

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IPC IPC(8): B24B1/00
CPCB24B1/00
Inventor 弥谦刘卫国郭忠达李宏秦琳
Owner XIAN TECHNOLOGICAL UNIV
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