Multipolar output array type thin micro-electromechanical system (MEMS) micro-propeller

A technology for output arrays and micro-thrusters, applied in the field of micro-propulsion technology and micro-electromechanical systems, can solve the problems of small specific impulse, difficult processing and production, and inability to multi-stage output, and achieve high thrust, simple structure and manufacturing process Effect

Active Publication Date: 2018-11-06
BEIJING UNIV OF TECH
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  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the disadvantages of resistance heating MEMS micro-thrusters such as small thrust, small spe

Method used

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  • Multipolar output array type thin micro-electromechanical system (MEMS) micro-propeller
  • Multipolar output array type thin micro-electromechanical system (MEMS) micro-propeller
  • Multipolar output array type thin micro-electromechanical system (MEMS) micro-propeller

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Embodiment Construction

[0038] A 200 μm thick double-sided polished silicon wafer is used as the upper cover 1, and the side micro-propeller liquid inlet 13 and the front micro-propeller liquid inlet 14 are fabricated on the upper cover 1, and the isotropic wet etching process is adopted, and the specific steps as follows:

[0039] first step, Figure 10 As shown in (a), the upper substrate 1 is cleaned with a standard RCA process; both sides are thermally oxidized and grown with a thickness of 1 μm Si0 2 , and then deposited 2μm Si by PECVD 3 N 4 , as a masking layer 29, and coat photoresist I28 on the upper and lower surfaces of the masking layer 29;

[0040] second step, Figure 10 As shown in (b), the circular pattern was made by UV deep exposure lithography, and CHF 3and He mixed gas reactive ion etching (DRIE) of Si0 in circular holes 2 and Si 3 N 4 The formed masking layer 29 exposes the surface of the upper substrate 1 to form a circular window to be etched;

[0041] third step, Fi...

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Abstract

The invention discloses a multipolar output array type thin micro-electromechanical system (MEMS) micro-propeller, and belongs to the field of micro-propulsion technologies and MEMSs. The micro-propeller adopts a mode that a front-face-type micro-propeller body and a side-face-type micro-propeller are combined. After an upper cover piece and a base of the multipolar output array type thin MEMS micro-propeller are manufactured, the upper cover piece and the base are assembled together through a bonding method and finally are bonded with a PCB with an excitation coil. Specifically, the multipolar output array type thin MEMS micro-propeller is manufactured through an MEMS micromachining technology, through high-frequency pulse induction heating, liquid around a heating disc is vaporized intogas rapidly, the high pressure is formed in a micro-cavity, the gas is ejected at a high speed through a nozzle under the effect of the high pressure, and the micro-propeller obtains driving force inthe opposite direction. The micro-propeller can be used for position holding, attitude control, orbital adjustment and the like of a microsatellite.

Description

technical field [0001] The invention is a multi-pole output array type thin MEMS micro propeller, which belongs to micro propulsion technology and micro electromechanical system [0002] (MEMS) field. Background technique [0003] The micro-propulsion system is the key subsystem of most micro-spacecraft, and it is mainly used for position maintenance, attitude control and orbit adjustment of micro-spacecraft such as micro-satellites, nano-satellites, and pico-satellites. Micro-propulsion based on MEMS technology combines micro-nano and micro-fabrication technology in technology, and has the advantages of easy miniaturization, integration, and low power consumption, so it has become an important research direction for micro-propulsion systems. In 2004, scholars at Tsinghua University developed a MEMS-based solid micro-thrust array. The MEMS solid micro-thrust can only achieve one-time ignition and cannot achieve multiple continuous propulsion. Even if it is integrated into a...

Claims

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Application Information

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IPC IPC(8): F03H99/00B81C1/00
CPCB81C1/00015B81C1/00396B81C1/00539B81C1/00841F03H99/00
Inventor 刘本东杨旭李默涵田宝华杨佳慧李德胜
Owner BEIJING UNIV OF TECH
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