Floating heating type vacuum diffusion pump
A vacuum diffusion and heating technology, applied to diffusion pumps, non-volume pumps, pumps, etc., can solve problems such as uneven heating, high energy consumption, and increased operating costs, and achieve reduced heating power and heating time, and start-up The effect of shortening the time and reducing the running cost
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Embodiment 1
[0023] Embodiment 1: the embodiment of a kind of floating heating type vacuum diffusion pump of the present invention is for example figure 1 As shown, the basic structure includes: pump body 1, pump core 2, cooling system 3, injection system 4, pump oil 6, evaporation system 7 and control system, pump core 2, cooling system 3, injection system 4, pump oil 6 and The control system is basically the same as the existing technology. The pump body 1 can be divided into two types: straight cavity and convex cavity. For the convenience of assembly, the bottom of the pump body 1 can be provided with a movable bottom plate 12. The evaporation system 7 can be formed from the bottom of the pump body 1 through heat insulation. Pad 13 is heat-insulated and installed inside the pump body 1. The outer surface of the evaporation system 7, the inner surface of the pump body 1 and the upper surface of the bottom plate 12 are low-emissivity surfaces or low-emissivity films to prevent the radiati...
Embodiment 2
[0030] Embodiment 2: Another embodiment of the floating heating vacuum diffusion pump of the present invention is as figure 2As shown, compared with Embodiment 1, a submersible pump 14 and an oil pipe 15 are added in the oil storage area 10; the submersible pump 14 is connected with the oil pipe 15, and the top of the oil pipe 15 is located at the nozzle of the primary injection system; the diffusion pump stops When vacuuming, first turn off the vacuum valve and the power supply of the evaporation system 7, stop the heating of the heater 5, and then turn on the submersible pump 14, the pump oil 6 in the oil storage area 10 is injected at the nozzle through the oil pipe 15, and a part of the pump oil 6 is injected into the The inner wall of the pump body 1 is cooled by the cooling system 3, and another part of the pump oil 6 is sprayed on the pump core 2 to cool the pump core 2. The pump oil 6 cooled by the cooling system 3 and the pump oil 6 heated by the pump core 2 The pump...
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