Mask and fabrication method thereof
A manufacturing method and mask technology, which are used in semiconductor/solid-state device manufacturing, ion implantation plating, coating, etc., can solve the problem that the quality and accuracy of the metal mask cannot meet the requirements of the process requirements, and the small Do 25μm to 40μm and other problems
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0019] It can be seen from the background art that the quality and accuracy of the metal mask cannot well meet the requirements of the process.
[0020] In order to solve the technical problem, the present invention uses semiconductor processes such as deposition, photolithography and etching to make a mask. Compared with the metal mask made by traditional chemical etching, the semiconductor process can improve the The quality of the mask plate and the accuracy of the through holes are improved, thereby improving the quality and accuracy of the mask plate, which is beneficial to improving the precision of the evaporation process.
[0021] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0022] figure 1 It is a structural schematic diagram of an embodiment of the mask plate of the present inven...
PUM
Property | Measurement | Unit |
---|---|---|
depth | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com