Single-axis and double-axis magnetic field sensors and preparation method thereof

Abstract

The embodiment of the invention provides a single-axis magnetic field sensor, a double-axis magnetic field sensor and a preparation method thereof. The single-axis magnetic field sensor comprises a first full-bridge circuit arranged on a substrate. The first full-bridge circuit comprises two first magnetic resistance modules and two second magnetic resistance modules. The two first magnetic resistance modules are located on a pair of opposite bridge arms of the first full-bridge circuit respectively. The two second magnetic resistance modules are located on the other pair of opposite bridge arms of the first full-bridge circuit respectively. The magnetization directions of the reference layers of the first magnetic resistance modules are perpendicular to the magnetization directions of thefree layers of the first magnetic resistance modules. The magnetization directions of the reference layers of the first magnetic resistance modules are the same. The magnetization directions of the reference layers of the second magnetic resistance modules are perpendicular to the magnetization directions of the free layers of the second magnetic resistance modules. The magnetization directions of the reference layers of the second magnetic resistance modules are the same. The included angle between the magnetization directions of the reference layers of the first magnetic resistance modulesand the magnetization directions of the reference layers of the second magnetic resistance modules is A and A is larger than 0 degree and smaller than 180 degrees. The technical scheme provided by theinvention has the advantages of simple process, low manufacturing cost and the like. The product yield can be improved, and the large-scale production requirement can be met.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a single-axis and double-axis magnetic field sensor and a preparation method thereof. Background technique [0002] At present, magnetic field sensors have been developed and applied in fields such as electronic compass. Generally, each sensing axis of a magnetic field sensor corresponds to two opposite pinning directions. [0003] In the prior art, since it is difficult to prepare two opposite pinning directions on one chip, the magnetic field sensor is usually obtained by splicing multiple chips. However, it is difficult to avoid mechanical errors when splicing multiple chips, which leads to low sensitivity and low yield of finished products, making it difficult to meet the needs of mass production. Contents of the invention [0004] Embodiments of the present invention provide a single-axis and double-axis magnetic field sensor and a preparation method thereof, aimi...

AI Technical Summary

Problems solved by technology

However, it is difficult to avoid mechanical errors when splicing multiple chips, which leads to low sensitivity and low yield of finished products, making it difficult to meet the needs of mass production.

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