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An optical path sensitive accelerometer

An accelerometer and optical path technology, applied in the measurement of acceleration, multi-dimensional acceleration measurement, velocity/acceleration/shock measurement, etc., can solve the problems of large three-axis orthogonality error, high cost, large volume, etc., and improve the measurement resolution. , low cost, small size effect

Active Publication Date: 2021-04-06
GUANGXUN SCI & TECH WUHAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The three-axis accelerometer formed by the assembly method will lead to a large three-axis orthogonality error, large volume and high cost

Method used

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  • An optical path sensitive accelerometer
  • An optical path sensitive accelerometer
  • An optical path sensitive accelerometer

Examples

Experimental program
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Effect test

Embodiment 1

[0042] Embodiment 1 of the present invention provides an optical path sensitive accelerometer, including a light source 2, a photodetector 3, a lens 4, and a first MEMS chip, wherein the first MEMS chip includes a mirror 6, a support beam 7, and a mass 8 The reflector 6 is arranged on the mass block 8, the mass block 8 is connected to the support beam 7, and under the action of acceleration, the support beam 7 causes the mass block 8 to be displaced along the Z-axis direction;

[0043] The lens 4 is placed between the plane where the light source 2, the photodetector 3 are located and the plane where the reflector 6 is located;

[0044] The photodetector 3 is used to receive the light generated by the light source 2 , adjusted by the lens 4 , and finally reflected by the mirror 6 .

[0045] The invention provides an optical path sensitive accelerometer, which uses the optical path loss caused by the axial displacement of the reflector on the mass block, and reversely demodulat...

Embodiment 2

[0054] In many applications, it is necessary to monitor three-dimensional acceleration at the same time. The traditional accelerometer is mainly a single-axis sensor. It is necessary to assemble three single-axis accelerometers to form a three-dimensional accelerometer, which will result in a large three-axis orthogonality error and a large volume. ,high cost. In order to overcome this technical problem, this embodiment 2 has made some improvements on the basis of embodiment 1, so that it can not only measure the acceleration in the Z direction through the displacement of the mass block 8, but also measure X and Y through the rotation of the mass block 8 Acceleration in the same direction, that is, three-dimensional acceleration can be monitored simultaneously without assembly. The main difference from Embodiment 1 is that in Embodiment 2, the PD array 10 is used to replace the original photodetector 3 for detecting the position and shape of the light spot; at the same time, a...

Embodiment 3

[0067] In order to better understand the principle of the optical path-sensitive accelerometer of the present invention, on the basis of Embodiment 2, this Embodiment 3 provides a specific use and measurement method of the above-mentioned accelerometer. The optical path sensitive accelerometer provided in Embodiment 2 adopts a PD array to receive reflected light, the path of the light spot movement and the size of the light spot can be detected, and is mainly used for simultaneous measurement of acceleration in three-dimensional directions, that is, X, Y, Z direction. Among them, the rotation of the mass block 8 along X and Y will cause the position of the light spot to change, but the shape of the light spot will basically remain unchanged; the displacement of the mass block 8 along the Z direction will cause the mirror 6 to deviate from the focal plane of the lens 4, and then reflect The spot size onto the PD array 10 changes.

[0068] The measurement and method of use of t...

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Abstract

The present invention relates to the field of speed measurement, in particular to an optical path sensitive accelerometer, which includes a light source, a photodetector, a lens and a first MEMS chip, wherein the first MEMS chip includes a reflector, a support beam and a quality block; the reflector Set on the mass block, the mass block is connected with the support beam, and under the action of acceleration, the support beam causes the mass block to displace along the Z-axis direction; the lens is placed between the plane where the light source, the photodetector is located, and the plane where the reflector is located; the photoelectric detection The receiver is used to receive the light generated by the light source, focused by the lens, and reflected back by the mirror. The invention uses the optical path loss caused by the axial displacement of the reflecting mirror to measure the acceleration value, and has the advantages of simple structure, small volume, easy processing, low cost and obviously improved resolution. At the same time, an accelerometer that can be used for three-dimensional measurement is improved on this basis. The chip design is simple and the resolution is high, which avoids the shortcomings of large orthogonality errors and large volume in traditional designs.

Description

【Technical field】 [0001] The invention relates to the field of speed measurement, in particular to an optical path sensitive accelerometer. 【Background technique】 [0002] An accelerometer is a sensor that measures the acceleration of an object, and its measurement principle is based on Newton's second law. The displacement of the mass block in the accelerometer has a definite relationship with the received acceleration, and the corresponding acceleration value can be measured by measuring the displacement. Micro Electro Mechanical Systems (MEMS for short) accelerometer has the characteristics of small size, light weight, low power consumption, high precision and low mass production cost, and is currently mainly used in motion perception, motion recognition, attitude control, vibration detection , Security alarm and so on. [0003] Currently mainstream MEMS accelerometers are capacitive. The accelerometer calculates the corresponding acceleration by detecting the change i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/18G01P15/093
CPCG01P15/093G01P15/18
Inventor 卜勤练王震郑洁赵慧王敏
Owner GUANGXUN SCI & TECH WUHAN
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