SOI-based gate-controlled lateral SAM structure blue-violet light single-photon detector and its preparation method
A single-photon detector and gate-controlled technology, applied in the field of blue-violet light single-photon detection, can solve the problems of small input impedance, long dead time, unfavorable integration, etc., and achieve the effects of large input impedance, accelerated recovery, and reduced dark current.
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[0025] Such as figure 1 As shown, the SOI-based gate-controlled lateral SAM structure blue-violet single-photon detector of this embodiment includes a surface with P - type silicon thin film 2 on SOI substrate 1, P - The thickness of type silicon thin film 2 is 100nm~800nm, P - One side of type silicon thin film 2 is provided with P + Zone 3, the other side is provided with adjacently arranged P zones 4 and N + District 5, P + The surface of the region 3 is provided with an electrode K, the surface of the P region 4 is provided with a gate oxide layer 6, and the surface of the gate oxide layer 6 is provided with gate electrodes G, N + The surface of zone 5 is provided with electrodes A.
[0026] Such as figure 1 As shown, in this embodiment, the SOI substrate 1 includes stacked P - Substrate 11 and SiO 2 Layer 12, P - type silicon thin film 2 set on SiO 2 layer 12 surface.
[0027] In this example, P - The thickness of the substrate 11 is 500 nm.
[0028] In this ...
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