Replacement device and replacement method of excimer laser window

Abstract

The invention relates to a replacement device and replacement method of an excimer laser window. The device comprises a replacement main cavity with an opening at one end. A cavity wall of the replacement main cavity is provided with multiple observation windows for observing the internal part of the replacement main cavity, a barometer for detecting the internal air pressure in the replacement main cavity, a vacuuming passage, an inflation passage, a plurality of finger sleeve holes and a window chamber. Both the vacuuming passage and the inflation passage communicate with the internal part of the replacement main cavity, and the finger sleeve holes are equipped with operation finger sleeves which facilitate the window replacement in the replacement main cavity. According to the replacement device and the replacement method, a diffusion phenomenon of a halogen medium in the process of replacing an excimer laser window can be significantly reduced, the contamination of parts in atmospheric exposure can be effectively avoided, the number of times of cleaning a discharge chamber and the harm to an operator can be effectively reduced, the passivation process is avoided or the passivation time is significantly reduced, and the use efficiency of a laser and the utilization rate of energy sources are improved.

Description

technical field [0001] The invention relates to the field of excimer laser technology, in particular to a replacement device and a replacement method for an excimer laser window. Background technique [0002] Excimer lasers are important laser devices in the ultraviolet band, which rely on the transition of molecules formed by excited mixed gases to the ground state to generate laser light. The mixed gas is generally composed of inert gas and halogen gas, such as argon (Ar) and fluorine (F2), krypton (Kr) and fluorine, xenon (Xe) and chlorine (Cl2), etc. The discharge cavity provides space for gas discharge, and it is composed of various components, such as electrodes, cavity walls, fans, diversion structures, radiators, windows, etc. Among them, windows and other parts are easy to be polluted and worn out, and need to be replaced or cleaned after a period of use. [0003] However, the excimer laser discharge cavity needs to be used in a sealed halogen-containing medium af...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve at least one of the above problems. The present invention provides a replacement device and a replacement method for an excimer laser window, which solves the problem that the replacement process of the excimer laser window parts will cause the residual working gas to exchange with the air medium. Operators create hazards, and the removal of introduced hazardous substances requires a lot of time and energy.

Images