High-temperature thin film strain meter of composite protection layer and preparation method thereof
A technology of protective layer and strain gauge, which is applied in the direction of coating, manufacturing microstructure devices, metal material coating technology, etc., can solve the problem of unstable resistance value, prevent oxidation, prevent resistance value change, and ensure normal operation Effect
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[0044]The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0045] Such as figure 1 , figure 2 Shown is a schematic structural diagram of a high temperature strain gauge deposited directly on a metal component, where figure 1 for figure 2 cutaway view.
[0046] see figure 1 , figure 2 , a high-temperature film strain gauge with a composite protective layer deposited directly on a metal structure, comprising: a high-temperature alloy member substrate 1, an alloy transition layer 2, an alumina insulating layer 3, an alumina protective layer 4, an alum...
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