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Preparation method for carbon film with vacuum long-lasting lubricating performance

A technology of lubricating performance and carbon film, which is applied in the field of carbon film preparation, can solve the problem of short wear life of carbon film, and achieve the effects of relieving internal stress, long life, excellent mechanical strength and elastic deformation ability

Active Publication Date: 2018-02-02
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of short wear life of carbon film in high vacuum environment, and to provide a preparation method of carbon film material with ultra-low friction, long-life wear and vacuum long-term lubricating performance under vacuum

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Equipment: The process is done on a magnetron sputtering coater with four target positions. Two of the target assembly steps (1) processed metal Cu targets are connected to an intermediate frequency sputtering power supply (20~60KHz) for excitation; the other two targets are assembled with silicon targets and are also connected to an intermediate frequency sputtering power supply ( 20~60KHz) for excitation; the sample holder is connected to a pulse bias power supply (20~60KHz) to apply negative voltage.

[0034] Coating process: including the following process steps:

[0035] (1) Metal Cu target pretreatment

[0036] Using conventional magnetron sputtering technology, pre-deposit a layer of Cu film with a thickness of 6nm on the surface of the metal Cu target; Under heat treatment for 10 minutes, and naturally cooled, a layer of Cu nanoparticles is formed on the surface of the target.

[0037] (2) Film coating

[0038] Plasma cleaning surface: place the sample blo...

Embodiment 2

[0043] Equipment: with embodiment 1.

[0044] Coating process: including the following process steps:

[0045] (1) Metal Cu target pretreatment

[0046] Using magnetron sputtering technology, pre-deposit a layer of Cu film with a thickness of 20 nm on the surface of the metal Cu target; then, under the protection of vacuum atmosphere, use a heating furnace to heat-treat the Cu target with the pre-deposited Cu film at 800 ° C for 30 min , naturally cooled, a layer of Cu nanoparticles formed on the surface of the target.

[0047] (2) Film coating

[0048] Plasma cleaning surface: place the sample block made of 9Cr18, TC4, 20CrMnTi (surface roughness is better than 50 nm) on the sample holder in the coating chamber, and the air pressure in the vacuum chamber is pumped to 1.0×10 -3 Below Pa, feed high-purity argon until the pressure is 1.4 Pa. Turn on the bias power supply, adjust the voltage value to -800 V, and perform argon plasma bombardment cleaning for 30 min;

[004...

Embodiment 3

[0053] Equipment: with embodiment 1.

[0054] Coating process: including the following process steps:

[0055] (1) Metal Cu target pretreatment

[0056] Using magnetron sputtering technology, pre-deposit a layer of Cu film with a thickness of 45nm on the surface of the metal Cu target; then under the protection of nitrogen atmosphere, use a heating furnace to heat-treat the Cu target with the pre-deposited Cu film at 900°C for 60min, A layer of Cu nanoparticles is formed on the target surface due to natural cooling.

[0057] (2) Film coating

[0058] Plasma cleaning surface: place the sample block made of 9Cr18, TC4, 20CrMnTi (surface roughness is better than 50nm) on the sample holder in the coating chamber, and the air pressure in the vacuum chamber is pumped to 1.0×10 -3 Below Pa, feed high-purity argon until the pressure is 1.0 Pa. Turn on the bias power supply, adjust the voltage value to -600 V, and perform argon plasma bombardment cleaning for 40 min;

[0059] ...

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Abstract

The invention provides a preparation method for a carbon film with vacuum long-lasting lubricating performance. Metal Cu with special nano morphology and the high catalytic characteristic is adopted as a target material, argon serves as sputtering gas, methane serves as a reaction gas source, a graphene precursor is formed on the surface of the target material through a hydrocarbon gas source, then sputtering is conducted, and thus the carbon film material inlaid with a graphene nano structure is prepared. Graphene has excellent mechanical strength and elastic deformation capacity, the graphene in the carbon film is of an ordered nanostructure and accordingly can take an effect of a reinforcing agent, thus, the mechanical performance of the carbon film is improved by a large margin, especially the high internal stress of the amorphous carbon film is relieved, and thus the carbon film has excellent roughness, the ultra-low friction coefficient under the vacuum environment and long service life. In consideration of the comprehensive performance advantages such as super-low friction under vacuum, the long service life, high hardness and high chemical stability of the carbon film, thecarbon film can be widely applied to surface lubricating treatment of moving parts used under the vacuum environment in various fields of aviation, spaceflight and the like.

Description

technical field [0001] The invention relates to a method for preparing a carbon thin film, in particular to a carbon thin film with ultra-low friction and long-term lubricating properties under vacuum and a preparation method thereof, which are mainly used in vacuum environments in various fields such as aviation and aerospace. Surface lubrication treatment of moving parts. Background technique [0002] With the rapid development of high and new technologies such as aerospace, aviation, and nuclear energy, more and more components (such as Stirling refrigerator piston components and vacuum suction pump components) need to operate in a high-vacuum environment. However, desorption and cold welding on the surface of materials in a high-vacuum environment can easily cause adhesion between contact surfaces, and lubrication technology is indispensable. Due to the problems of volatilization and degradation in high vacuum environment, the application of traditional fluid lubricatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/02
CPCC23C14/0036C23C14/024C23C14/0605C23C14/352
Inventor 吉利李红轩刘晓红周惠娣陈建敏
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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