Chemical vapor deposition furnace

Abstract

The invention relates to a chemical vapor deposition furnace. The chemical vapor deposition furnace comprises a crucible used for containing raw materials, a crucible cover used in cooperation with the crucible, a deposition chamber, a material collecting box and a gas guide tube, wherein the crucible, the crucible cover, the deposition chamber, the material collecting box and the gas guide tube are assembled from bottom to top; a plurality of first through holes making the crucible and the deposition chamber communicate are formed in the crucible cover, and a second through hole making the deposition chamber and the material collecting box communicate is formed in the material collecting box; and the chemical vapor deposition furnace further comprises a first heater used for heating the crucible, a dust collecting chamber and a dust collecting chamber cover plate covering the dust collecting chamber are arranged inside the material collecting box, and a third through hole making the dust collecting chamber and the material collecting box communicate is formed in the dust collecting chamber cover plate. The chemical vapor deposition furnace is reasonable in structure, multi-stage collection is carried out on zinc sulfide products, defects such as fog spots, fog layers and patterns do not exist in the prepared zinc sulfide, the overall thickness deviation of the zinc sulfide products is small, and the product conversion rate is high.

Description

technical field [0001] The invention relates to the field of powder or crystal preparation devices, in particular to a chemical vapor deposition furnace. Background technique [0002] Zinc sulfide is an infrared material, and its production method generally adopts chemical vapor deposition. The production equipment of zinc sulfide generally includes the following parts: electrical control system, gas supply system, cooling circulating water system, chemical vapor deposition furnace, dust collection system, vacuum system and tail gas treatment system. Among them, the electrical control system is mainly used for Various process parameters and equipment are controlled during the production process. The gas supply system is mainly used to supply the process gas required in the production process; the cooling circulating water system is mainly used to cool down the production equipment; the chemical vapor deposition furnace is the main equipment of the entire production device ,...

AI Technical Summary

Problems solved by technology

Zinc sulfide production by chemical vapor deposition generally uses zinc and hydrogen sulfide as raw materials. Most of the zinc sulfide produced by the reaction of zinc and hydrogen sulfide will be deposited in the deposition chamber, but some will still enter the deposition chamber. If the chemical vapor deposition furnace Unreasonable design will affect the pressure of the system and affect the progress of production

Images