A small direct-drive metal-sealed piezoelectric proportional valve

Abstract

The invention discloses a small direct-driven type all-metal sealing piezoelectric proportional valve. A piezoelectric direct-driven mode is adopted, an amplified structure does not need to be adopted, and accordingly the advantages, of a piezoelectric actuator, of large output force and high positioning precision are guaranteed; the positioning precision of the piezoelectric actuator can reach an nm order, and compared with other valves, the proportional valve designed in this way can be used for performing high-precision and high-resolution proportional flow control within a wide pressure range; and in addition, since the direct-driven mode is adopted, the seal passing diameter can also be increased, accordingly the required opening height is decreased so as to further decrease the length of the piezoelectric actuator, and miniaturization of the valve is achieved.

Description

technical field [0001] The invention relates to a small direct-drive metal-sealed piezoelectric proportional valve, which is suitable for a fluid control system with low power consumption, high precision, high resolution, micro flow rate, multiple working media and large pressure working range. Background technique [0002] In the field of micro-flow proportional control, piezoelectric actuators, as an intelligent material actuator, have the advantages of high displacement resolution, large output force, low power consumption, and fast response, and have become the preferred driving method for high-precision flow control in the future. There are broad application prospects on dragless spacecraft and all-electric push platforms. However, the small output displacement of the piezoelectric ceramic driver has become a key bottleneck restricting its use. Generally, the deformation ratio is 1 / 1000. For example, the output displacement of a 1mm piezoelectric sheet is only 1 μm at t...

AI Technical Summary

Problems solved by technology

The disadvantage of this piezoelectric switch valve is that it cannot realize proportional control; it is not directly driven, and the amplification mechanism is used, resulting in reduced output force and a small working pressure range; the sealing force is provided by the piezoelectric driver, and the sealing effect is not good, so it is not applicable For occasions with high requirements for sealing

The disadvantage of this piezoelectric valve is that it uses a non-metal seal, which means that a longer piezoelectric driver needs to be added to overcome the deformation of the non-metal material compared with the metal seal, and the volume is large, which is not suitable for miniaturization; When used in corrosive working media, the requirements for gasket materials are relatively high, which is not conducive to popularization

The shortcomings of the valve pump structure are still non-direct drive, low positioning accuracy; and the piezoelectric drive plate is in an alternating force state, and the service life is low

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