Evaporation source

Abstract

The invention provides an evaporation source which comprises an evaporation source body, wherein the evaporation source body is made of a conductive material; the evaporation source body comprises a main body; a material cavity is formed inside the main body; and a first electrode connecting end, and a second electrode connecting end with polarity opposite to that of the first electrode connecting end are arranged in any position on the outer side of the main body. After the first electrode connecting end and the second electrode connecting end are electrified, the main body is conducted and generates heat, and then a material inside the material cavity is heated; compared with a conventional evaporation source, the evaporation source provided by the invention is made of the conductive material, self heating of the evaporation source is achieved by setting positive and negative electrodes in corresponding positions of the evaporation source, furthermore a uniform heating effect is achieved, and a high-quality membrane layer is prepared through evaporation.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to an evaporation source. Background technique [0002] In the vacuum coating process, the evaporation material needs to be evaporated (or sublimated) into steam through the evaporation source, and the steam forms a film layer after condensation on the surface of the object to be evaporated. Therefore, whether the steam generated by the evaporation source is uniform is very important to the quality of the formed film layer. The evaporation source is usually in the form of a "line source", which includes a long chamber with multiple air outlets evenly opened on the top of the chamber, and a crucible connected to the bottom of the chamber. The crucible is used to hold the evaporation material and evaporate it, resulting in The steam enters the chamber and exits the nozzle. [0003] The quality of film formation is directly related to the temperature and rate of evaporation. ...

AI Technical Summary

Problems solved by technology

[0005] The invention provides an evaporation source, which can make each area of ​​the material chamber be heated evenly, and then evaporate to form a high-quality film layer, so as to solve the evaporation source in the prior art. The crucible is not heated uniformly, so that the evaporation in the evaporation chamber The plating material is heated unevenly, and the quality of the film is not good, which makes it difficult to produce high-quality OLED display panels.

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