A tunable metamaterial structure based on mechanical movement and its fabrication method

Abstract

The present invention belongs to the infrared and terahertz band modulator and detector technical field and discloses a mechanical movement-based tunable metamaterial structure and a making method thereof. The mechanical movement-based tunable metamaterial structure comprises a fixed graphic structure, a metamaterial structure, a fixing box and a micro-displacement controller; the fixing box comprises a frame with an opening formed at the top and a hole formed at the first side; the metamaterial structure is placed in the fixing box; the fixed graphic structure is embedded in the opening of the top end of the fixing box so as to be fixed; the micro-displacement controller comprises a U-shaped frame and a micrometer caliper arranged at one end of the U-shaped frame; one end of the U-shaped frame is fixed at the second side surface of the outer side of the fixing box; the rotation shaft of the micrometer caliper contacts with the metamaterial structure; and the micrometer caliper controls the metamaterial structure through the rotation shaft so as to make the metamaterial structure move along a direction opposite to the first side surface and second side surface of the fixing box, so that relative micro-displacement of the fixing graphic structure and the metamaterial structure occurs, and therefore, the resonance peak frequency of the metamaterial can be modulated and absorbed.

Description

technical field [0001] The invention relates to the technical field of modulators and detectors in infrared and terahertz bands, and in particular to a mechanically movable tunable metamaterial structure and a manufacturing method thereof. Background technique [0002] Different from atomic, molecular and nanoscale materials such as copper, iron and semiconductors that have been studied and applied in the past, metamaterials are a brand new material. "Electromagnetic metamaterial" (metamaterial) refers to some artificial composite structures or composite materials with extraordinary physical properties that natural materials do not have. By orderly and rationally designing the key physical dimensions of metamaterials in its structure, breakthroughs in some apparent natural laws can be achieved, and supernormal functions that are not possessed by the inherent ordinary properties of nature can be obtained. Metamaterials are a new type of man-made materials that can modulate e...

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Problems solved by technology

[0012] The technical problem mainly solved by the present invention is that in the process of making metamaterials, it is necessary to make a mask plate for ultraviolet lithography and then carry out ultraviolet lithography. The fine structure leads to a low success rate of making metamaterials. Technical problems with inefficient use of materials

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