Surface treatment method for bismuth telluride base thermoelectric material wafer
A technology of thermoelectric materials and surface treatment, which is applied in the direction of circuits and semiconductor devices, etc., can solve the problems of many conversion steps of spraying and electroplating process, low maximum temperature difference of coolers, affecting thermoelectric performance, etc., and achieve excellent solderability and protection performance, Effect of reduced fluctuation and high bonding strength of coating
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Embodiment 1
[0021] Chemical degreasing: the degreasing solution is an aqueous solution, which is prepared by mass percentage from 8% sodium hydroxide, 5% sodium carbonate, 1.5% sodium phosphate and 0.5% sodium silicate, heated to 85°C, and soaked for 30 minutes , After degreasing, rinse with cold water.
[0022] Activation: The activation solution is an aqueous solution, containing 20ml of 37% hydrochloric acid, 5ml of hydrofluoric acid and 20 3g of surfactant Tween per liter, and activate at room temperature for 3min; Anode, stainless steel as cathode, current density 5A / m 2 ; Process 2min; Finally, use the pre-plating nickel activation solution containing 240g of nickel chloride and 300ml of 37% hydrochloric acid per liter at the nickel plate anode and wafer cathode with a current density of 5.5A / m 2 ; Treatment 3min.
[0023] Nickel plating: The nickel plating solution is composed of nickel sulfate 280g / L, nickel chloride 50g / L, boric acid 40g / L, wetting agent NP-A 2ml / L and cylinder...
Embodiment 2
[0026] Chemical degreasing: The degreasing solution is an aqueous solution, which is prepared by 5% sodium hydroxide, 3% sodium carbonate, 3% sodium phosphate and 1% sodium silicate by mass percentage. Heat to 95°C, soak for 20 minutes, and rinse with cold water after degreasing.
[0027] Activation: The activation solution is an aqueous solution, containing 15ml of 37% hydrochloric acid, 3ml of hydrofluoric acid and 20 6g of surfactant Tween per liter, activated at room temperature for 2min; Anode, stainless steel as cathode, current density 5A / m 2 ; Process 2min; Finally, use the pre-plating nickel activation solution containing 240g of nickel chloride and 300ml of 37% hydrochloric acid per liter at the nickel plate anode and wafer cathode with a current density of 7.5A / m 2 ; Process 2min.
[0028] Nickel plating: The nickel plating solution is composed of nickel sulfate 350g / L, nickel chloride 25g / L, boric acid 50g / L, wetting agent NP-A 1ml / L and cylinder opening agent M-...
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