Ion nitriding device for realizing workpiece nitriding temperature equalization

Abstract

The invention relates to an ion nitriding device, in particular to an ion nitriding device for realizing workpiece nitriding temperature equalization. The device comprises a furnace body, a furnace chassis, a multifunctional active screen, an upper transmission system, a lower transmission system, an intake system and an exhaust system. The device is characterized in that the furnace body is cylindrical; the furnace chassis is disc-shaped; the furnace body is put rightly above the furnace chassis to form a furnace cavity; the multifunctional active screen is vertically suspended in the furnace cavity; the upper transmission system is fixed at the top of the furnace body; the upper transmission system drives the multifunctional active screen to rotate clockwise; the lower transmission system is fixed on the furnace chassis, and drives workpieces to anticlockwise rotate; the intake system consists of an intake part of the upper transmission system, and an intake part of the multifunctional active screen; and the exhaust system consists of a main exhaust pipe and a branch exhaust pipe. The ion nitriding device effectively improves the intake and exhaust uniformity, increases the gas decomposition rate and stabilizes the cathode and anode distance to realize the workpiece nitriding temperature uniformity and to guarantee consistence of nitriding layer thicknesses and performances. The related device is also suitable for physical vapor deposition and chemical vapor deposition of material surfaces.

Description

technical field [0001] The invention relates to an ion nitriding device, in particular to an ion nitriding device for realizing uniform temperature of workpiece nitriding, and belongs to the technical field of material chemical heat treatment. Background technique [0002] Ion nitriding, also known as ion nitriding and glow nitriding, belongs to the category of plasma heat treatment and is a kind of material chemical heat treatment. Specifically, under the condition of lower than one atmospheric pressure, the workpiece is placed as the cathode in the environment of nitrogen-containing gas, the gas is ionized, and a micro-plasma arc is generated between the cathode and the anode. Under the action of a strong electric field, the positive ions and neutral particles When the workpiece is bombarded, the ion kinetic energy is converted into heat energy, thereby heating the workpiece; due to adsorption and diffusion, the activated nitrogen ions penetrate into the surface of the wor...

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Problems solved by technology

[0005] The object of the present invention is to provide an ion nitriding device for realizing uniform nitriding temperature of workpieces. This ion nitriding device for realizing uniform nitriding temperature of workpieces can simultaneously improve the uniformity of air intake and pumping, accelerate gas decomposition, Stabilize the distance between the cathode and anode to solve the technical problem of inhomogeneity in the nitriding temperature of the workpiece

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