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Solid-state atomic spin sensing structure surface stress noise ultra high precision test system

A technology of atomic spin and structural surface, applied in the field of quantum sensing, which can solve the problems of unstable output signal of transmitter

Active Publication Date: 2017-09-08
ZHONGBEI UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

The second is that the output of the pressurized transmitter does not change, and the third is that the output signal of the transmitter is unstable

Method used

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  • Solid-state atomic spin sensing structure surface stress noise ultra high precision test system
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  • Solid-state atomic spin sensing structure surface stress noise ultra high precision test system

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Embodiment Construction

[0016] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0017] An ultra-high-precision test system for surface stress noise of a solid-state atomic spin sensing structure, including a 532nm laser, a microwave source, a coupler, a photodetector, a signal modulator, and a pressure display.

[0018] The specific connection relationship is as figure 1 As shown, the pressure sensor includes a pressure probe, and the pressure probe includes a diamond substrate 6, and the middle part of the upper surface of the diamond substrate 6 is processed with a diamond NV color center waveguide, and the diamond NV color center waveguide has a thickness of 200 microns and a diameter of 200 μm. Micron. A 200nm-thick diamond refractive index matching layer covering the NV color center waveguide is grown on the upper surface of the diamond substrate 6 as a reflective film 5 to reflect the fluorescence generated by exci...

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Abstract

The present invention discloses a solid-state atomic spin sensing structure surface stress noise ultra high precision test system. The system comprises a probe, the probe, the probe comprises a diamond substrate, a diamond NV color center waveguide is processed at the middle portion of the upper surface of the diamond substrate, a diamond refractive index matching layer coated with the NV color center waveguide is grown at the upper surface of the diamond substrate and is taken as a reflecting film, a microstrip antenna array is processed at the upper surface of the diamond substrate, a microstrip antenna port is arranged at the microstrip antenna array and is connected with a microwave source, and the upper surface of the microstrip antenna array is plated with a piezomagnetic film. The solid-state atomic spin sensing structure surface stress noise ultra high precision test system employs the diamond substrate embedded with the NV color center waveguide as a sensing unit, employs the laser to realize electronic energy level transition, the piezomagnetic film in a pressure probe is under external pressure through scanning of microwave to generate a magnetic field correlated to the size of the pressure, and the difference of microwave frequencies corresponding to two peak values of a fluorescence intensity spectral line is employed to perform calibration of pressure so as to realize ultrahigh precision measurement of the pressure.

Description

technical field [0001] The invention relates to the field of quantum sensing, in particular to an ultra-high-precision testing system for stress noise on the surface of a sensitive unit structure based on the diamond NV color center quantum spin effect. Background technique [0002] Micromechanical (MEMS) sensors are the most commonly used sensor types in industrial practice and instrumentation control. It is necessary to accurately measure the surface stress of micromechanical structures in the process of processing, experimentation, and testing to improve the performance of micromechanical structures. It is also important for measuring devices. Stable work in a complex environment puts forward higher requirements. In addition, the structure of sensor products is developing in a comprehensive, coordinated and sustainable manner. Product varieties should be inclined to high technology and high added value, especially to fill "blank" varieties. The currently widely used sur...

Claims

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Application Information

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IPC IPC(8): G01L9/16
Inventor 唐军郭浩刘俊赵锐刘文耀赵彬彬马宗敏朱强高研杰
Owner ZHONGBEI UNIV
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