Electronic dynamic control and chemical auxiliary corrosion-based machining method for oval microlens

Abstract

The invention relates to an electronic dynamic control and chemical auxiliary corrosion-based machining method for an oval microlens, which belongs to the technical field of application of functionality surfaces. The method comprises the following steps: adjusting a light path of a femtosecond laser system, and ensuring that laser can be vertically incident to a material surface to be machined which is horizontally placed; placing a slit in a position where the light path passes by, adjusting the position of the slit, adjusting a width of the slit to a required size, and ensuring that the laser vertically passes by a center of the slit; performing imaging by means of an imaging CCD and a lighting white light source, observing a surface topography and a machining process of the machined material, matching turning on and off of a mechanical switch, and performing machining of a certain region and a certain interval on the material surface to be machined; and immersing a sample with an overall modified region into an etching solution of certain concentration for etching. Compared with the prior art, the invention provides a simple, controllable and efficient machining method for efficient and high-quality preparation of the oval lens.

Description

technical field [0001] The invention relates to an elliptical microlens processing method based on electronic dynamic regulation and chemical assisted etching, and belongs to the technical field of functional surface applications. Background technique [0002] Elliptical microlenses have important applications in modern optical sensing, optical computing, optical fiber communication, and other optoelectronic devices. In order to realize the preparation of elliptical microlenses, it is necessary to construct a surface with anisotropic morphology on the surface of the material, and the specific processing methods include chemical titration, grinding, reflux sol-gel method, etc. Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Li Tonghai, Wu Guojun, Hu Baowen, Wang Lili, Li Yulin. Preparation of elliptical microlens and its application in LD beam shaping[J]. Science Technology and Engineering, 2005, (24): 1890- 1892+1902.) The elliptical microlens arr...

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Problems solved by technology

Xi'an Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (Li Tonghai, Wu Guojun, Hu Baowen, Wang Lili, Li Yulin. Preparation of elliptical microlens and its application in LD beam shaping[J]. Science Technology and Engineering, 2005, (24): 1890- 1892+1902.) The elliptical microlens array was obtained on polymethyl methacrylate (PMMA) by chemical titration, but the processing technology using this method is complicated, the requirements for processing environment and equipment are relatively high, and the efficiency Relatively low; a research group of a university in Taiwan (Lu Y K, Tsai Y C, Liu Y D, et al. Asymmetric elliptic-cone-shaped microlens for efficient coupling to high-power laser diodes [J]. Optics express, 2007, 15(4): 1434-1442.) used the grinding method to process elliptical microlenses at the end of the optical fiber, but this method requires high equipment and complicated operations; Nanyang Technological University research group (He M, Yuan X C, Ngo N Q, et al .Low-cost and efficient coupling technique using reflowed sol-gel microlens[J].Optics express,2003,11(14):1621-1627.) An elliptical microlens array was prepared by the reflow sol-gel method, but the method operates complex, with specific requirements for materials

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