Array substrate, display apparatus and manufacturing method therefor
A technology of array substrates and substrate substrates, which is applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve problems such as reduced reliability, leakage, and inability to repair polysilicon, so as to improve reliability and reduce leakage problems Effect
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[0019] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0020] see figure 1 , figure 1 It is a schematic structural diagram of an embodiment of the array substrate of the present invention, the array substrate includes: a base substrate 10 and a low-temperature polysilicon transistor 20 and an oxide transistor 30 located above the base substrate 10, a display area B and a display area B are arranged on the substrate. In the non-display area A around the area B, the low temperature polysilicon transistor 20 is located in the non-display area A, and the oxide transistor 30 is located in the display area B. Wherein, the low-temperature polysilicon transistor 20 includes a polysilicon layer 21 and a first insulating layer 22 stacked, and the first insulating layer 22 includes a silicon oxide layer 222 and a silicon nitride layer 221, wherein the silicon nitride layer 221 is located between the polysilicon lay...
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