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Method of manufacturing piezoelectric vibrator element

一种压电振动片、制造方法的技术，应用在压电/电致伸缩器件的制造/组装、压电/电致伸缩/磁致伸缩器件、电路等方向，能够解决强度降低、压电振动片损伤等问题

Active Publication Date: 2017-07-21
SII CRYSTAL TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In addition, regarding the piezoelectric vibrating reed, there are cases where the strength of each part is lowered along with its miniaturization.
Therefore, there is a risk of damage to the piezoelectric vibrating reed due to the stress acting through the connecting portion during singulation.

Method used

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  • Method of manufacturing piezoelectric vibrator element
  • Method of manufacturing piezoelectric vibrator element
  • Method of manufacturing piezoelectric vibrator element

Examples

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Embodiment Construction

[0033] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0034] (Piezoelectric vibrator)

[0035] figure 1 It is an external perspective view of the piezoelectric vibrator according to the embodiment. figure 2 It is an internal configuration diagram of the piezoelectric vibrator according to the embodiment. image 3 Yes figure 2 Sectional view at line Ⅲ-Ⅲ. Figure 4 It is an exploded perspective view of the piezoelectric vibrator according to the embodiment.

[0036] Such as Figure 1 to Figure 4 As shown, the piezoelectric vibrator 1 of this embodiment adopts a ceramic package type surface mount vibrator, which includes a package 2 having a hermetically sealed cavity C inside, and a piezoelectric vibration housed in the cavity C Piece 3.

[0037] In addition, the piezoelectric vibrator 1 is formed in a rectangular parallelepiped shape in a plan view. In the present embodiment, in the plan view, the longitudinal direction of the piezoelectr...

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PUM

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Abstract

There is provided a method of manufacturing a piezoelectric vibrator element capable of preventing the piezoelectric vibrator element from being damaged when segmentallizing the piezoelectric vibrator element. The method of manufacturing a piezoelectric vibrator element (3) includes the steps of providing the wafer (60) with the piezoelectric plate (30) and a frame part (62) adapted to support the piezoelectric plate (30) via a connection part (61), providing a pair of excitation electrodes to the piezoelectric plate (30), and forming a pair of extending electrodes (47, 48) extending from the piezoelectric plate (30) to the frame part (62) through the connection part (61) and electrically connected respectively to the pair of excitation electrodes (47, 48), and segmentallizing the piezoelectric plate (30) by cutting the connection part (61). In the step of providing the pair of excitation electrodes, the pair of extending electrodes (47, 48) are formed on a side surface (61b) of the connection part (61).

Description

Technical field [0001] The present invention relates to a method of manufacturing a piezoelectric vibrating piece. Background technique [0002] For example, in electronic devices such as mobile phones and portable information terminal equipment, piezoelectric vibrators using crystals and the like are used as devices for time sources, timing sources such as control signals, and reference signal sources. As such a piezoelectric vibrator, a piezoelectric vibrator in which a piezoelectric vibrating reed is hermetically sealed in a package in which a cavity is formed is known. In recent years, with the downsizing of electronic devices, there has been an increasing demand for the downsizing of piezoelectric vibrators and piezoelectric vibrating reeds. [0003] For example, as described in Patent Document 1, a plurality of piezoelectric vibrating reeds are manufactured at a time using wafers formed of piezoelectric materials. At this time, the piezoelectric vibrating piece is formed in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/02H03H9/02H01L41/22H01L41/27
CPCH03H3/02H03H9/02H03H2003/023H10N30/01H10N30/05H03H9/1014H03H9/21H03H2003/026H10N30/082H10N30/063H10N30/067
Inventor 市村直也
Owner SII CRYSTAL TECH
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