Manufacturing method of TFT (Thin Film Transistor) substrate structure
A production method and substrate technology, which are applied in the photoengraving process of the pattern surface, the original for photomechanical processing, the exposure device of the photoengraving process, etc. Complete and other problems, to avoid the slope of the groove becoming slower, the adhesion is not affected, and the display quality can be improved.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0041]In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0042] see Figure 8 , the present invention provides a kind of manufacturing method of TFT substrate structure, comprises the following steps:
[0043] Step 1, such as Figure 9 As shown, a substrate 10 is provided, and a thin film transistor is arranged on the substrate 10; the substrate 10 includes an effective display area 11 and a peripheral circuit area 12 surrounding the effective display area 11, and the peripheral circuit area 12 includes a fan-out region 121 and the non-fan-out region; the planar layer 20 is formed by coating on the substrate 10 .
[0044] Specifically, the material of the flat layer 20 is organic photoresist.
[0045] Specifically, the thin film transistor is a low temperature polysilicon thin film transistor.
...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com