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Apparatus and method for isolating temperature influence by using two surface acoustic wave resonators

A surface acoustic wave, temperature separation technology, applied in the direction of using ultrasonic/sonic/infrasonic waves, measuring devices, instruments, etc., can solve the problem that the SAW strain sensor cannot be used

Inactive Publication Date: 2017-06-27
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

However, the experimental results show that the resonant frequency of the SAW strain sensor will be affected by both the temperature change and the strain change, which makes the traditional SAW strain sensor unable to be used in a variable temperature environment, and can only perform strain measurement in an environment with a constant temperature

Method used

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  • Apparatus and method for isolating temperature influence by using two surface acoustic wave resonators
  • Apparatus and method for isolating temperature influence by using two surface acoustic wave resonators
  • Apparatus and method for isolating temperature influence by using two surface acoustic wave resonators

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Embodiment Construction

[0017] 1. Preparation of SAW resonators: SAW resonators are manufactured on piezoelectric substrates with different tangential directions by microelectronic lithography technology, and Au electrodes are grown on the substrates by electron beam evaporation technology, and then peeled off by glue remover. The remaining glue is used to make SAW resonators, and a layer of Si0 is deposited on one of the SAW resonators by plasma chemical vapor deposition. 2 film, changing the transition temperature of this device to be the same as that of the other device, i.e.

[0018] 2. Temperature strain test: Bond the two devices prepared in step 1 to the same horizontal position on the strain test piece, and the SAW propagation direction is parallel to the main strain direction. Strain tests were performed on the two devices at different temperatures to obtain f r01 , a 1 , f r02 , a 2 ,s 1 ,s 2 and other parameter values. After obtaining these parameters, by testing the strain freque...

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Abstract

The invention discloses an apparatus and method for isolating the temperature influence by using two surface acoustic wave resonators, and belongs to the design field of surface acoustic wave sensors. The device comprises two surface acoustic wave resonators. The two surface acoustic wave resonators are arranged on an object to be measured along a main strain direction thereof, and surface acoustic wave propagation directions of the two surface acoustic wave resonators are the same as the main strain direction of the object to be measured. Each surface acoustic wave resonator includes a piezoelectric substrate and an electrode disposed on the piezoelectric substrate. The device is characterized in that tangential directions of the piezoelectric substrate materials of the two surface acoustic wave resonators are different and the piezoelectric substrate of one of the surface acoustic wave resonators is provided with a thin film thereon that covers the electrode and enables the coverage temperature of the two surface acoustic wave resonators to be the same. The device offsets the influence of the temperature parameters on the surface acoustic wave devices by using the characteristics that the two devices have the same temperature parameters and different strain parameters, and ultimately achieves the measurement of the strain.

Description

technical field [0001] The invention belongs to the design field of surface acoustic wave sensors, and relates to a design method for constructing a strain sensor by using two surface acoustic wave resonators, in particular to a method for changing the transition temperature of a surface acoustic wave resonator by using a coating film. Background technique [0002] Surface Acoustic Wave (SAW) generally refers to various waves that are generated on the free surface of an elastomer and propagate along the surface and interface. SAW devices propagate and process signals by utilizing SAW waves. The SAW device is mainly composed of an interdigital transducer (Interdigital, IDT) and a piezoelectric material substrate. Piezoelectric materials are important carriers for signal propagation and energy conversion. When the piezoelectric substrate is under pressure, charges will be generated at both ends of the substrate to form a potential difference. [0003] IDT can directly excite...

Claims

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Application Information

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IPC IPC(8): G01B17/04
CPCG01B17/04
Inventor 彭斌崔亦霖张万里喻恒邓泽佳刘兴钊
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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