Radial shearing interference wave front detection device based on micro-optical device

Abstract

The invention discloses a radial shear interference wavefront detection device based on a micro-optical device, comprising a polarization direction modulator (1), a polarization ring path direction shear system CRSS, a micro phase modulation array MPA and a photodetector (9 ), the micro-phase modulation array MPA is composed of a microwave chip array (7) and a polarizer (8). Using the birefringence effect of a birefringent crystal, the micro-phase modulation array is fabricated by a micro-optical processing method to realize the space phase of the radially sheared beam. The wavefront phase distribution of the beam to be measured is inverted by a random phase shift algorithm. The invention adopts an all-common optical path structure, which can be immune to environmental vibration and has a stable interferogram; the structure is compact and easy to transplant; the micro-optical device has a large scale, low precision requirements, low cost, and is convenient for mass production; it has a wide spectral range and is insensitive to chromatic aberration. The invention can be applied to the fields of adaptive optics, optical detection, thermal imaging and the like.

Description

technical field [0001] The invention relates to the technical field of wavefront sensors based on interference principles, in particular to a radial shear interference wavefront detection device based on micro-optical devices. Background technique [0002] Wavefront sensors based on the principle of interferometry have attracted extensive attention due to their high spatial resolution and high measurement accuracy. Typical interferometric wavefront sensors such as point diffraction interferometers, shearing interferometers, etc. Among them, the shearing interferometer has received a lot of research by researchers because of its high light energy utilization rate and common optical path structure to resist external interference. [0003] In the patent "Common Optical Path Shear Interferometer Based on Four-step Spatial Phase Shift Structure" (patent application number: CN201010034142.3), the author proposed a common optical path shear interferometer based on four-step spatia...

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Problems solved by technology

[0005] The technical problems to be solved by the present invention are: the traditional radial shearing interferometer has a high structural complexity, the metal wire grid-based micro-polarizer array has complicated technology, high processing precision requirements, high cost, is not conducive to batch production, and can only Aiming at the shortcomings of specific spectrum detection, a new micro-phase modulation array based on a microwave plate array and a polarizer is proposed as a polarization phase shifter to perform a micro-polarization phase shift on the radially sheared polarized beam pair, and finally use a random phase Shift algorithm to solve the phase to be measured

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