A kind of diamond/diamond-like carbon multilayer composite coating and preparation method thereof
A diamond coating, multi-layer composite technology, applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of coating stress and coating toughness, etc. , Solve the effect of high stress and poor toughness
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[0017] Specifically, the embodiment of the present invention provides a method for preparing a diamond / diamond-like carbon multilayer composite coating, which includes the following steps:
[0018] S01. Provide a substrate, perform surface pretreatment on the substrate and then load the furnace;
[0019] S02. Under vacuum conditions, pass in methane and perform the first coating process, depositing a diamond coating on the surface of the substrate, wherein the heating temperature of the first coating process is 2000-2500°C, and the substrate temperature is 600-1000°C, the methane concentration is 0.5-3%;
[0020] S03. Under vacuum conditions, adjust the heating temperature and methane concentration to perform a second coating process, deposit a diamond-like coating on the surface of the diamond coating, wherein the heating temperature of the second coating process is 1500-2200°C, The substrate temperature is 400-800°C, and the methane concentration is 2-5%;
[0021] S04. Repeat the f...
Embodiment 1
[0041] In this embodiment 1, a WC-6%Co tool is used as a substrate, and the method for preparing a diamond / diamond-like carbon multilayer composite coating on the substrate includes the following steps:
[0042] S11. Provide a substrate, perform surface pretreatment on the substrate and then load the furnace; specifically,
[0043] S111. Put the WC-Co knife into the acetone solution for ultrasonic cleaning for 30 minutes, and dry it in a constant temperature drying oven at 60°C for 10 minutes;
[0044] S112. Put the cleaned carbide tool into K 3 [Fe(CN) 6 ]+KOH+H 2 O(wt%=1:1:10) alkali mixture ultrasonic for 10min, remove distilled water for cleaning, and then use H 2 SO 4 +H 2 O 2 (vol%=1:10) Soak for 10s, take out distilled water for cleaning, and dry at 60℃ for 20min;
[0045] S113. Put the pretreated tool into a diamond suspension with a mass fraction of 10% by ultrasonic for 30 minutes, take out distilled water for cleaning, and blow dry;
[0046] S114. Heating wire pretreatment: T...
Embodiment 2
[0052] In this embodiment 2, a TiC-Co tool is used as a substrate, and the method for preparing a diamond / diamond-like carbon multilayer composite coating on the substrate includes the following steps:
[0053] S21. Provide a substrate, perform surface pretreatment on the substrate and then load it into a furnace; specifically,
[0054] S211. Put the TiC cutter into the acetone solution for ultrasonic cleaning for 20 minutes, and dry for 10 minutes in a constant temperature drying oven at 70°C;
[0055] S212. Put the cleaned carbide tool into K 3 [Fe(CN) 6 ]+KOH+H 2 O(wt%=1:1:10) Alkali mixture was ultrasonicated for 15min, and the distilled water was removed for cleaning, and then H 2 SO 4 +H 2 O 2 (vol%=1:10) Soak for 15s, take out the distilled water for cleaning, and dry at 60°C at constant temperature for 20min;
[0056] S213. Put the pretreated tool into a diamond suspension with a mass fraction of 8% by ultrasonic for 45 minutes, remove distilled water for cleaning, and blow dry...
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