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Diamond/diamond-like multilayer composite coating and preparation method thereof

A diamond coating and multi-layer composite technology, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problems that cannot be solved such as coating stress and coating toughness, and achieve favorable coating stress , solve the effect of high stress and simple operation

Active Publication Date: 2017-05-31
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing a diamond / diamond-like multilayer composite coating, which aims to solve the problem that the existing method for preparing diamond / diamond-like cannot solve the problems of coating stress and coating toughness

Method used

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  • Diamond/diamond-like multilayer composite coating and preparation method thereof

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preparation example Construction

[0017] Specifically, the embodiment of the present invention provides a method for preparing a diamond / diamond-like multilayer composite coating, comprising the following steps:

[0018] S01. Provide a substrate, carry out surface pretreatment on the substrate and load it into a furnace;

[0019] S02. Under vacuum conditions, feed methane and carry out the first coating process, and deposit a diamond coating on the surface of the substrate, wherein the heating temperature of the first coating process is 2000-2500 ° C, and the substrate temperature is 600-1000°C, the methane concentration is 0.5-3%;

[0020] S03. Under vacuum conditions, adjust the heating temperature and methane concentration to carry out the second coating process, and deposit a diamond-like coating on the surface of the diamond coating, wherein the heating temperature of the second coating process is 1500-2200 ° C, The substrate temperature is 400-800°C, and the methane concentration is 2-5%;

[0021] S04....

Embodiment 1

[0041] With WC-6%Co cutter as substrate in this embodiment 1, the method for preparing diamond / diamond-like multilayer composite coating on described substrate comprises the steps:

[0042] S11. Provide a substrate, carry out surface pretreatment on the substrate and load it into a furnace; specifically,

[0043] S111. Put the WC-Co tool into the acetone solution for ultrasonic cleaning for 30 minutes, and dry it in a constant temperature drying oven at 60°C for 10 minutes;

[0044] S112. Put the cleaned carbide tool into K 3 [Fe(CN) 6 ]+KOH+H 2 O (wt%=1:1:10) alkali mixed solution was ultrasonicated for 10min, and distilled water was taken out for cleaning, and then washed with H 2 SO 4 +H 2 o 2 (vol%=1:10) Soak for 10s, take out distilled water to wash, dry at constant temperature at 60°C, and dry for 20min;

[0045] S113. Put the pretreated cutter into a diamond suspension with a mass fraction of 10% and sonicate for 30 minutes, take out distilled water for cleaning,...

Embodiment 2

[0052] With TiC-Co cutter as substrate in this embodiment 2, the method for preparing diamond / diamond-like multilayer composite coating on described substrate comprises the steps:

[0053] S21. Provide a substrate, carry out surface pretreatment on the substrate and load it into a furnace; specifically,

[0054] S211. Put the TiC cutter into an acetone solution for ultrasonic cleaning for 20 minutes, and dry in a constant temperature drying oven at 70°C for 10 minutes;

[0055] S212. Put the cleaned carbide tool into K 3 [Fe(CN) 6 ]+KOH+H 2 O (wt%=1:1:10) alkali mixed solution was ultrasonicated for 15min, and distilled water was taken out for cleaning, and then washed with H 2 SO 4 +H 2 o 2 (vol%=1:10) Soak for 15s, take out distilled water and wash, dry at constant temperature at 60°C, and dry for 20min;

[0056] S213. Put the pretreated cutter into 8% diamond suspension by mass fraction and sonicate for 45 minutes, take out the distilled water for cleaning, and blow ...

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Abstract

The invention is suitable for the technical field of vacuum coating, and provides a preparation method of a diamond / diamond-like multilayer composite coating. The preparation method includes the following steps that a base is provided, and after surface pretreatment is performed on the base, the base is contained in a furnace; under the vacuum condition, methane is introduced, the first coating process is performed, and a diamond coating is deposited on the surface of the base; and under the vacuum condition, the heating temperature and the methane concentration are adjusted to perform the second coating process, and a diamond-like coating is deposited on the surface of the diamond coating; and the first coating process and the second coating process are repeated to prepare a multilayer composite structure with diamond layers and diamond-like layers alternately deposited is prepared, and the outermost layer of the obtained diamond / diamond-like multilayer composite coating is the diamond-like coating.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a diamond / diamond-like multilayer composite coating and a preparation method thereof. Background technique [0002] Diamond is the material with the highest hardness (HV=100Gpa) among the materials known in nature. It has excellent thermal conductivity, low friction and super wear resistance, and is an ideal tool coating material. At present, diamond coatings are mostly prepared by the hot wire chemical deposition (HFCVD) method, which is relatively mature in technology and low in production cost, and is suitable for industrial production. However, due to the strong covalent bond characteristics of diamond and the film-forming process characteristics of HFCVD, the diamond coating has the disadvantages of high coating stress and poor toughness, which reduces the performance of the diamond coating. Diamond-like carbon (DLC) is a sp 2 and sp 3 Amorphous carbon ...

Claims

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Application Information

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IPC IPC(8): C23C16/44C23C16/27C23C16/52
CPCC23C16/271C23C16/52
Inventor 唐永炳蒋春磊张静
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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