Manufacturing method of cantilever beam fiber grating accelerometer

Abstract

The present invention provides a manufacturing method of a cantilever beam fiber grating accelerometer. The sensor comprises a substrate, a spring leaf, a quality block, a side cover and a fiber grating. The substrate, the spring leaf and the quality block are assembled through mechanical coordination and laser welding to form a cantilever structure. The fiber grating performs etching on the G.657 fiber, the fiber tension performance is improved through adoption of macromolecule ultrathin coating, and the epoxy resin dispensing is employed to fix the positions between the fiber grating and substrate and the quality block to assemble a fiber grating acceleration sensor. A balance weight hole is processed on the quality block in advance, the assembled sensor is calibrated, and the dispensing or machining is performed on the balance weight hole to flexibly regulate the sensitivity and the resonant frequency point of the sensor to optimize the performance index of the acceleration sensor. The manufacturing method of the cantilever beam fiber grating accelerometer simplifies the design and processing requirement of the acceleration sensor, simple in operation method and high in practicality, and the made sensor is high in sensitivity, small in insertion loss and excellent in performace.

Description

technical field [0001] The invention relates to the technical field of fiber grating applications, in particular to a method for manufacturing a cantilever beam type fiber grating acceleration sensor. Background technique [0002] Fiber Bragg grating sensing technology has the characteristics of high sensitivity, simple multiplexing, anti-electromagnetic interference, passive, etc., and is very popular in the field of acceleration sensors. At present, most fiber grating acceleration sensors use mechanical structures to increase sensitivity, convert acceleration changes into wavelength changes on fiber gratings, and then restore sensing information through grating demodulators. Such as the patent "A Cantilever Beam Type Fiber Bragg Grating Accelerometer" (Application No.: 200710065321.X), "Fiber Bragg Grating Accelerometer Based on Cantilever Beam Deflection" (Application No.: 200710065322.X), "Double Equal Intensity Cantilever Beam Fiber Grating Vibration Sensor" (Applicati...

AI Technical Summary

Problems solved by technology

However, in the actual production process, due to the influence of fiber grating strain error, machining error of mechanical parts, structural assembly error, etc., the parameters of the sensor after assembly will deviate from the design value, and even cannot be used in serious cases, requiring rework and maintenance

However, because the fiber optic grating is easy to damage, and epoxy resin is often used to bond it to the mechanical structure, it is very easy to cause damage to the grating during maintenance and disassembly, and the sensor is mostly designed as a semi-closed structure with a narrow internal space, making maintenance, processing and handling very difficult

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