Negative photosensitive resin composition, partition wall, and optical element
A technology of photosensitive resin and composition, which is applied in the direction of nonlinear optics, optics, electrical components, etc., and can solve problems such as multi-exposure, sensitivity, and pattern shape influence
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[0305] Hereinafter, the present invention will be described in more detail using examples, but the present invention is not limited to these examples. Examples 1, 2, and 3 are examples, and example 4 is a comparative example.
[0306] Each measurement was performed by the following method.
[0307] [Number average molecular weight (Mn)]
[0308] Using a commercially available GPC measuring device (manufactured by Tosoh Corporation, device name: HLC-8320GPC), gels of several types of monodisperse polystyrene polymers with different degrees of polymerization commercially available as standard samples for molecular weight measurement were measured. Permeation chromatography (GPC), according to the molecular weight of polystyrene and the relationship between retention time (retention time) to make a standard curve.
[0309] After diluting the sample with tetrahydrofuran to 1.0% by mass and passing it through a 0.5 μm filter, the GPC of the sample was measured using the aforement...
Synthetic example 1
[0337] [Synthesis Example 1: Synthesis of Ink Repellent (D1) and Preparation of (D1-1) Liquid]
[0338] At 50cm with the mixer 3 0.38 g of the above-mentioned compound (d-11) and 2.35 g of the above-mentioned compound (d-21) were charged in a three-necked flask, and a raw material mixture of the ink repellent agent (D1) was obtained. Next, 5.56 g of PGME was put into this raw material mixture to prepare a solution (raw material solution).
[0339] To the obtained raw material solution, 1.71 g of 1.0 mass % nitric acid aqueous solution was dripped, stirring at room temperature. After completion|finish of dripping, it stirred for 5 more hours, and obtained the PGME solution containing (D1) by 10 mass %, ie (D1-1) liquid. The fluorine-containing content (mass % of fluorine atoms) of the composition excluding the solvent of the obtained (D1-1) liquid was 20.0 mass %. In addition, the number average molecular weight (Mn) of the composition other than the solvent of (D1-1) liquid...
Synthetic example 2
[0340] [Synthesis Example 2: Synthesis of Ink Repellent (D2) and Preparation of (D2-1) Liquid]
[0341] At 50cm with the mixer 3 0.38 g of the above-mentioned compound (d-11), 1.11 g of the above-mentioned compound (d-21) and 0.72 g of the above-mentioned compound (d-31) were charged in a three-necked flask, and a raw material mixture of the ink repellent agent (D2) was obtained. Next, 6.36 g of PGME was put into this raw material mixture to prepare a solution (raw material solution).
[0342] To the obtained raw material solution, 1.43 g of a 1.0 mass % nitric acid aqueous solution was dripped, stirring at room temperature. After completion of the dropwise addition, it was further stirred for 5 hours to obtain a PGME solution containing (D2) at 10% by mass, that is, a (D2-1) liquid. The fluorine-containing content (mass % of fluorine atoms) of the composition excluding the solvent of the obtained (D2-1) liquid was 20.0 mass %. In addition, the number average molecular weig...
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