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Self-driven TiO2 ultraviolet detector and preparation and application thereof

A UV detector, self-driven technology, applied in semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc., to achieve simple preparation, improve photoresponse efficiency, and reduce recombination

Inactive Publication Date: 2017-02-15
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Has not yet seen the use of TiO 2 A report on self-driven ultraviolet detection with surface homogeneous and heterojunction electrodes as a sandwich structure

Method used

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  • Self-driven TiO2 ultraviolet detector and preparation and application thereof
  • Self-driven TiO2 ultraviolet detector and preparation and application thereof
  • Self-driven TiO2 ultraviolet detector and preparation and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] 1) Place the FTO transparent conductive substrate in acetone, isopropanol, ethanol and deionized water for 20 minutes, and then dry it under air flow;

[0031] 2) Place the pre-cleaned FTO transparent conductive substrate (conductive side down) in a polytetrafluoroethylene-lined hydrothermal kettle, add 0.15 mL of tetrabutyl titanate containing HCl and H 2 O volume ratio of 1:1 mixed solution, at 180 ℃ for 2h, grow TiO on the FTO substrate 2 Nanorod array, the nanorod length is about 2μm; XRD results show that the synthesized nanorod array is a pure rutile phase.

[0032] 3) TiO obtained in step (2) 2 The rutile phase nanorod arrays were placed in a three-electrode electrolytic cell, and TiO 2 Electrode, saturated calomel electrode and Pt electrode are research electrode, reference electrode and counter electrode. Choose a constant voltage of -1.8V, and restore it for 2s;

[0033] 4) Put the clean FTO obtained in step (1) into the magnetron sputtering equipment, use...

Embodiment 2

[0039] 1) Place the FTO transparent conductive substrate in acetone, isopropanol, ethanol and deionized water for 20 minutes, and then dry it under air flow;

[0040] 2) Place the pre-cleaned FTO transparent conductive substrate (conductive side down) in a polytetrafluoroethylene-lined hydrothermal kettle, add 0.15 mL of tetrabutyl titanate containing HCl and H 2O volume ratio of 1:1 mixed solution, at 180 ℃ for 2h, grow TiO on the FTO substrate 2 Nanorod array, the nanorod length is about 2μm; XRD results show that the synthesized nanorod array is a pure rutile phase.

[0041] 3) Put the clean FTO obtained in step (1) into the magnetron sputtering equipment, use the Pt metal target as the target material, and firstly vacuumize the equipment for 10 -5 Pa, and then pass Ar gas into it, adjust the sputtering pressure to 1Pa, and sputter for 1min under the direct current mode of 60W to obtain a layer of Pt conductive electrode, and leave a round hole on it for future use.

[00...

Embodiment 3

[0045] 1) Place the FTO transparent conductive substrate in acetone, isopropanol, ethanol and deionized water for 20 minutes, and then dry it under air flow;

[0046] 2) Place the pre-cleaned FTO transparent conductive substrate (conductive side down) in a polytetrafluoroethylene-lined hydrothermal kettle, add 0.15 mL of tetrabutyl titanate containing HCl and H 2 O volume ratio of 1:1 mixed solution, at 180 ℃ for 2h, grow TiO on the FTO substrate 2 Nanorod array, the nanorod length is about 2μm; XRD results show that the synthesized nanorod array is a pure rutile phase.

[0047] 3) TiO obtained in step (2) 2 The rutile phase nanorod arrays were placed in a three-electrode electrolytic cell, and TiO 2 Electrode, saturated calomel electrode and Pt electrode are research electrode, reference electrode and counter electrode. Choose a constant voltage of -1.6V, and restore it for 2s;

[0048] 4) Put the clean FTO obtained in step (1) into the magnetron sputtering equipment, use...

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Abstract

The invention provides a self-driven TiO2 ultraviolet detector and a preparation method thereof. The detector comprises a transparent conductive substrate, a TiO2 homogeneous heterojunction, electrolyte and a conductive electrode in sequence from bottom to top, isolating films are arranged between a TiO2 film and the conductive electrode to form a sandwich structure through packaging, and the middle part is filled with the electrolyte. The detector comprises the homogeneous heterojunction formed by a TiO2 bulk phase and a surface amorphous phase, directional separation of photocarriers is promoted through a built-in electric field formed on a homogeneous heterojunction interface, the recombination of the photocarriers is reduced, and the photoresponse efficiency is improved. Compared with the conventional TiO2-based ultraviolet detector, the self-driven TiO2 ultraviolet detector is advantageous in that a bias voltage does not need to be applied, the response speed is fast, the response sensitivity is high, and the preparation is simple.

Description

technical field [0001] The invention belongs to the technical field of semiconductor optoelectronic devices, in particular to a self-driven TiO 2 Ultraviolet detection device and its preparation method. Background technique [0002] In recent years, ultraviolet detection technology has received widespread attention in both military and civilian fields, and has been applied in fields such as flame detection, missile tracking, and optical fiber communication. With the rapid development of material preparation technology, metal-semiconductor-metal (MSM) ultraviolet detectors based on one-dimensional nanomaterials have appeared in recent years. Compared with traditional photodetectors, one-dimensional nanostructures have larger aspect ratios. , which is beneficial to the separation of photogenerated carriers. However, the ultraviolet detector of this MSM structure has a high turn-on potential, and needs to work under a high external bias voltage, which is not conducive to devi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/09H01L31/032H01L31/18B82Y30/00
CPCH01L31/0324H01L31/09H01L31/1876Y02P70/50
Inventor 李灿严鹏丽韩洪宪甘阳吴义辉冯兆池
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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