Method and device for correlative multi-focus laser separation of fragile transmission material

A multi-focus, through-beam technology, used in laser welding equipment, metal processing equipment, welding equipment, etc., can solve the ideal design of laser multi-focus position and focus energy distribution, affect the thickness and quality of cutting and separation materials, The laser focus energy distribution is quite different and other problems, to achieve high-quality safe cutting separation, large practical use value, and improve the effect of cutting quality

Active Publication Date: 2017-02-15
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

However, most of the existing multi-focus laser separation adopts the reflective focusing method to generate multi-focus laser (such as Chinese invention patent ZL201210118371.0). During the process of continuous reflection and propagation of the laser, the laser energy is continuously lost due to divergence, resulting in The number of laser focuses is small, and the energy distribution of each laser focus is quite different. Although the stress generated along the thickness direction has improved, there is still unevenness, and the unevenness becomes more serious as the thickness of the material increases. Therefore, laser cutting separation Material thickness is still limited
In addition, due to the inherent defects of the design method of this method of reflective focusing to generate multi-focus, the position of laser multi-focus generation and the energy distribution of the focus cannot be carried out according to the optimal design, which affects the thickness and quality of cutting and separating materials.

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  • Method and device for correlative multi-focus laser separation of fragile transmission material
  • Method and device for correlative multi-focus laser separation of fragile transmission material
  • Method and device for correlative multi-focus laser separation of fragile transmission material

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specific Embodiment approach

[0027] The technical solution provided by the present invention can be completed by one embodiment, and there are two specific embodiments for the composition and optical path of the multifocal lens group. The specific implementation includes the following steps:

[0028] (1) Two sets of multifocal lens groups are composed of a series of focusing lenses with small holes in the center or different diameters. Among them, the number, focal length, aperture diameter, or focusing lens diameter of each focusing lens is determined by the thickness, absorptivity, refractive index and other parameters of the cut brittle transmission material. Adjust the distance of each focusing lens to make the laser focus position moderate.

[0029] (2) The laser, light guide mirror, and beam expander form the first laser processing system, and the multifocal lens group is placed in front of the first laser processing system so that its optical axis is coaxial. Among them, the choice of laser type is de...

example 1

[0041] Two YLM-150 model fiber lasers are used as the first and second lasers, with an output wavelength of 1070nm and a maximum output power of 150W. The cutting material is KDP optical crystal, and the cutting size is 150mm×150mm×150mm. Two sets of identical lens groups are formed by using 1 conventional focusing lens and 2 focusing lenses with different diameters. Each laser beam will produce 3 laser focal points after passing through the lens group. The distance between the laser focal points is 20mm, and the laser energy The distribution (laser focus is arranged in sequence along the laser transmission direction) ratio is 30%, 30%, 40%. The two sets of laser processing systems produce a total of 6 laser focal points, and the center distance between the two sets of laser focal points produced by the two sets of laser processing is 20mm. Experimental method: The first and second laser processing systems emit light at the same time, and the laser output power is adjusted to ...

example 2

[0043] Two SD-YAG-600W Nd:YAG lasers are used as the first and second lasers, with an output wavelength of 1064nm and a maximum output power of 600W. The cutting material is quartz material, and the cutting size is 200mm×200mm×200mm. Two sets of identical lens groups are formed by using 1 conventional focusing lens and 2 focusing lenses with a small hole in the center. Each laser beam will produce 3 laser focal points after passing through the lens group. The distance between the laser focal points is 30mm. The energy distribution (laser focus is arranged in sequence along the laser transmission direction) ratio is 30%, 30%, 40%. The two sets of laser processing systems produce a total of 6 laser focal points, and the center distance between the two sets of laser focal points produced by the two sets of laser processing is 20mm. Experimental method: The first and second laser processing systems emit light at the same time, and the output power of the two lasers is adjusted to ...

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Abstract

The invention discloses a method and a device for correlative multi-focus laser separation of a fragile transmission material. The method is characterized in that the same technological parameters are adopted, and coaxial laser is utilized to penetrate multi-focus lens groups and to conduct inverse correlation on two sides in the thickness direction of the fragile transmission material to be separated, so that the number of focuses generated in the fragile transmission material is doubled to improve the laser energy absorption uniformity of the fragile transmission material in the thickness direction and to enhance the heating expansion uniformity of the fragile transmission material in the thickness direction. After a laser multi-focus beam leaves, the fragile transmission material is quickly cooled down in the thickness direction to produce tensile stress, so that separation of the thick fragile transmission material is realized by laser. The device comprises two sets of multi-focus laser processing systems and one three-dimensional working platform, wherein each set of the multi-focus laser processing system comprises a laser, light guiding mirrors, a beam expanding mirror and a multi-focus lens group. The method and the device realize high-quality, efficient and high-success-ratio separation of the thick fragile transmission material.

Description

Technical field [0001] The invention belongs to the technical field of laser processing applications, and in particular relates to a method and device for separating brittle transmission materials with an opposite beam multi-focus laser. The method is particularly suitable for the separation of thick and brittle transmission materials such as KDP optical crystals. [0002] technical background [0003] Laser thermal cracking is currently an effective method for cutting and separating brittle transmission materials (such as glass, optical glass, optical crystal, etc.) to obtain high-quality separation edges. This method uses a laser focusing lens to focus the laser beam on the surface or inside of a transparent material, and uses the brittle transmission material's higher absorption rate for a certain wavelength of laser light (such as the 10.6μm laser beam) to form a surface to absorb the laser energy and make the brittle transmission The surface of the material is heated; or the l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/38B23K26/067
CPCB23K26/0676B23K26/38
Inventor 段军刘朋邓磊敏曾晓雁
Owner HUAZHONG UNIV OF SCI & TECH
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