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Process for preparing mesoporous graphene and field effect transistor biosensor based on mesoporous graphene

A field-effect transistor and mesoporous graphene technology, applied in the field of biosensors, can solve the problems of random layer stacking structure, uneven layer number, complex manufacturing process, etc., to improve sensitivity, high current switching ratio, and reduce manufacturing cost Effect

Active Publication Date: 2016-12-07
GOLDEN SUN FUJIAN SOLAR TECHNIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] (3) Layer number control method; single-layer graphene is difficult to meet the application requirements in some fields, and it is necessary to develop a preparation process for preparing high-quality few-layer and multi-layer graphene; for example, the intrinsic band gap of single-layer graphene is zero , has great application limitations in the field of semiconductors; existing studies have shown that bilayer graphene with an AB stacking structure can produce continuously adjustable band gaps within a certain range under the action of an external electric field, although for the growth of bilayer graphene Graphene has done a lot of research, but because the grown double-layer graphene cannot be precisely regulated, or it is a random layer stacking structure, or the number of layers is uneven, there are more three-layer or single-layer regions; how to control the stacking structure, Improving the uniformity of layer number is a common problem faced by the current CVD growth of bilayer and multilayer graphene research
[0007] In summary, it is simple and feasible to design the geometric size of graphene to control the band gap through physical methods; however, due to the constraints of photolithography technology, the width of graphene nanoribbons prepared by etching is greatly limited
In addition, cutting carbon nanotubes cannot guarantee the uniformity of graphene nanoribbons, and is not suitable for large-scale preparation; forming mesopores on graphene is a feasible solution for band gap regulation, and graphite can be regulated by the size of mesopores. The energy gap of graphene; patent 201210032772.4 uses anodized aluminum oxide (AAO) templates to prepare graphene nanopore arrays, but the manufacturing process of AAO templates is relatively complicated, including high-purity aluminum pretreatment, primary oxidation, secondary oxidation, and through-hole processes. In order to ensure that the pore size and pore spacing of the AAO template are different, it is necessary to control the type, concentration, temperature, oxidation potential and time of the electrolyte; compared with the AAO template method, the soft template is generally easy to construct, does not require complicated equipment, and is easy to operate. Low cost, etc., has attracted widespread attention; Duan Xiangfeng from the University of California, Los Angeles, etc. prepared mesoporous graphene through a block polymer soft template, successfully opened the gaps of graphene, and can adjust the pores The spacing can achieve the purpose of regulating the gap of graphene; as we all know, graphene has a huge specific surface area, covering the graphene with a block polymer soft template will increase the difficulty of cleaning the graphene surface, and there will be polymer residues on the graphene surface. Affecting the performance of field effect transistors and other issues

Method used

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  • Process for preparing mesoporous graphene and field effect transistor biosensor based on mesoporous graphene
  • Process for preparing mesoporous graphene and field effect transistor biosensor based on mesoporous graphene
  • Process for preparing mesoporous graphene and field effect transistor biosensor based on mesoporous graphene

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Embodiment

[0036] (1) Preparation of graphene film 11 by chemical vapor deposition method, as attached figure 1 , Transfer the graphene film 11 to Si / SiO 2 On the substrate 21, Si / SiO is obtained 2 / Graphene 22, clean, N 2 Blow dry for use;

[0037] (2) Disperse PMMA nanospheres 23 with a particle size of 8-80nm in a mixed solvent of 5-10mL deionized water / absolute ethanol (volume ratio 1:1), and slowly drop the PMMA nanosphere 23 dispersion into In the 0.5-5wt% surfactant SDS solution, PMMA nanospheres 23 are assembled at the gas / liquid interface to form a single-layer nanosphere film, Si / SiO 2 / Graphene 22 is inserted obliquely below the liquid surface, and the single-layer PMMA nanosphere 23 film is transferred to the graphene surface;

[0038] (3) The Si / SiO obtained in (2) 2 / Graphene / PMMA nanospheres, bake at 120-150℃ for 10-30min to make PMMA nanospheres 23 closely adhere to the surface of graphene 22, as attached figure 2 ; Then, a 10-100nm metal film 31, such as a metal Al film, is v...

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Abstract

The invention relates to a process for preparing mesoporous graphene and a field effect transistor biosensor based on the mesoporous graphene. Periodically arranged nanometer microsphere arrays are assembled on the surface of graphene, evaporation of a metal film is performed, nanometer microspheres are removed, the metal film serves as a mask to prepare mesoporous graphene with different pore diameters is prepared, the mesoporous graphene having different hole pitches is obtained, and the goal of regulating energy gaps of the graphene is achieved; oxygen plasma is utilized to etch active oxygen-containing groups formed by the graphene, and bioactive molecules can be connected; use of common coupling agents such as AuNPs, glutaraldehyde, pyrenebutyric acid, 1-hydroxysuccinimide eater-1-pyrenebutyric acid is avoided, and the manufacturing cost of the biosensor is greatly reduced. According to the field effect transistor biosensor based on the mesoporous graphene, band gaps of the graphene are opened, the biosensor has a large current on / off ratio, a very small amount of biomolecules can make electric conductivity of a graphene conducting channel have a remarkable response, and the detection sensitivity is greatly improved.

Description

Technical field [0001] The invention belongs to the field of biosensors, and particularly relates to a process for preparing mesoporous graphene and a biosensor based on mesoporous graphene field effect transistors. Background technique [0002] Graphene is a new type of two-dimensional carbon material that exhibits excellent electrical properties. Nanoelectronic devices based on graphene are considered to be excellent alternatives to traditional semiconductors. However, the zero band gap of intrinsic graphene limits its depth Important application factors, such as field effect transistors, require non-zero band gap semiconductor materials; therefore, it is of great significance to control the band gap width of graphene. [0003] With the development of graphene preparation technology, it is relatively easy to obtain graphene with a complete structure, but the band gap width of graphene is almost zero or very small, and its use in the preparation of semiconductor devices is greatl...

Claims

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Application Information

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IPC IPC(8): G01N27/327
CPCG01N27/3278
Inventor 林本慧
Owner GOLDEN SUN FUJIAN SOLAR TECHNIC
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