A preparation process of mesoporous graphene and biosensor based on mesoporous graphene field effect transistor
A mesoporous graphene and preparation technology, applied in the field of biosensors, can solve the problems of uneven layer number, random layer stacking structure, complex manufacturing process, etc., achieve high current switching ratio, improve sensitivity, and reduce manufacturing cost Effect
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[0036] (1) Graphene film 11 was prepared by chemical vapor deposition, as attached figure 1 , transfer graphene film 11 to Si / SiO 2 On the substrate 21, get Si / SiO 2 / graphene 22, cleaned, N 2 Blow dry and set aside;
[0037] (2) Disperse PMMA nanospheres 23 with a particle size of 8-80nm in a mixed solvent of 5-10mL deionized water / absolute ethanol (volume ratio 1:1), and slowly add the dispersion of PMMA nanospheres 23 to the In 0.5-5wt% surfactant SDS solution, PMMA nanospheres 23 are assembled at the gas / liquid interface to form a single-layer nanosphere film, Si / SiO 2 / Graphene 22 is obliquely inserted below the liquid surface, and the single-layer PMMA nanosphere 23 film is transferred on the graphene surface;
[0038] (3) Si / SiO obtained in (2) 2 / graphene / PMMA nanospheres, baked at 120-150°C for 10-30min, so that PMMA nanospheres 23 are closely attached to the surface of graphene 22, as attached figure 2 ; Then, metal thin film 31 of 10-100nm is deposited on its...
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