Multistage vacuum adsorption device for polishing of magnetorheological plane and machining method of multistage vacuum adsorption device

Abstract

The invention discloses a multistage vacuum adsorption device for polishing of a magnetorheological plane and a machining method of the multistage vacuum adsorption device. The device comprises a vacuum adsorption generating device, a conversion device for different stage numbers and a vacuum adsorption device; the vacuum adsorption generating device comprises an air guiding pipe, a rotary connector, a base body, a main shaft and an air guiding connector; the conversion device for different stage numbers comprises a connection sleeve, an end cover, a manual ball valve and a connection pipe; and the vacuum adsorption device comprises a third-stage fixing piece, a third-stage porous ceramic disk, a second-stage fixing piece, a second-stage porous ceramic disk, a first-stage fixing piece and a first-stage porous ceramic disk. Based on the magnetorheological effect, the multistage vacuum adsorption device for polishing of the magnetorheological plane can clamp optical elements in different sizes in a vacuum adsorption manner under the situation that the porous ceramic disks are not abraded, and the vacuum adsorption device is low in cost, simple in structure, reliable in adsorption, convenient, practical and capable of being applicable to ultra-smooth magnetorheological polishing of planes of the optical elements in different sizes.

Description

technical field [0001] The invention relates to a multi-stage vacuum adsorption device for magnetorheological plane polishing and a processing method thereof, in particular to abrasive semi-fixed magnetorheological grinding and polishing under multi-stage vacuum adsorption for optical element planes. Background technique [0002] With the rapid development of aerospace, precision instruments, and optical technology, as well as the increasing demand for processing various high-precision plane, curved surfaces, and complex-shaped parts such as satellite attitude control and telemetry devices, lithography, and optoelectronic devices, the application of optoelectronic devices is increasingly Widely put forward higher requirements for the shape accuracy and surface accuracy of photoelectric component processing. Ultra-precision processing technology is a supporting technology for the optoelectronic device manufacturing industry. It is widely used in information technology, aerosp...

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Problems solved by technology

[0005] Patent CN200610132495.9 arrays a plurality of magnetic bodies in an orderly manner on the base of a diamagnetic material polishing disc to realize clustered magneto-rheological effect plane polishing, which improves the polishing efficiency and polishing area, and realizes the processing of large-sized workpieces, but clusters The problem of effective clamping of workpieces in magnetorheological plane polishing has not been well resolved

At present, the widely used method is waxing, but this method is difficult to ensure the uniformity of the thickness of the wax layer, resulting in uneven surface of the workpiece, and the workpiece is prone to uneven heating and breakage during the removal process; ensure the surface of the substrate for clamping parts In the process of magnetorheological polishing, when the magnetorheological flexible polishing pad processes the workpiece with a certain gap, due to the thinner thickness of the workpiece, the flexible polishing pad can also keep in contact with the substrate of the clamping part, and the abrasive particles Under the action of the substrate, the substrate is worn, thereby affecting the surface accuracy of the substrate of the clamping part

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