Micro scanner and preparation method of GaN-base LED light source of micro scanner

Abstract

The invention discloses a micro scanner and a preparation method of a GaN-based LED light source of the micro scanner. The micro scanner is characterized in that the micro scanner is of a single structure, and includes a GaN-based LED light source, an electrostatic MEMS micro actuator, an MEMS micro twisted bar, a p-GaN electrode and a lens. The GaN-based LED light source grows on a Si substrate, the lens is arranged on the GaN-based LED light source, the electrostatic MEMS micro actuator includes fixed comb teeth and movable comb teeth which are in cross-contact, and the MEMS micro torsion bar is connected to the electrostatic MEMS micro actuator. When the micro scanner is used, the electrostatic MEMS micro actuator drives rotation of the micro torsion bar, and further drives rotation of the LED light source to perform scanning. The micro scanner is simple in system structure, is easy to calibrate and assemble, and is convenient to use and carry. The GaN-based LED light source is more suitable for application to a portable scanner.

Description

technical field [0001] The invention relates to the technical field of scanners, in particular to a micro-scanner and a method for preparing a GaN-based LED light source thereof. Background technique [0002] A scanner is a high-tech product integrating light, machinery and electricity. It is an important tool for inputting various forms of image information into a computer. It is the third-generation computer input device after the keyboard and mouse. Scanners have stronger functions than keyboards and mice. From the most original pictures, photos, films to all kinds of manuscript materials, they can be input into the computer with the scanner, and then realize the processing, management, use, Storage, output, etc., combined with optical character recognition software, can also convert scanned documents into computer text form. Scanners on the market are mainly composed of an upper cover, an original table, an optical imaging part, a photoelectric conversion part, and a me...

AI Technical Summary

Problems solved by technology

Although the optical system of the above-mentioned MEMS laser micro-scanner is relatively miniaturized compared with the traditional scanner, because the light source and the optical system are separated, the calibration assembly is more complicated, and it is not convenient to carry

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