Variable-focus micro lens array structure based on electric actuation and preparation process thereof

Abstract

A variable-focus micro lens array structure based on electric actuation and a preparation process thereof are provided. The structure is a 'sandwich' structure, wherein the bottom layer is a transparent conductive electrode, the middle layer is an elastic organic transparent polymer layer, and the top layer is a flexible conductive layer. The preparation process comprises the following steps: preparing a graphical dielectric polymer film layer on the surface of a conductive electrode to form an induced template; then, preparing an elastic organic transparent polymer layer on the surface of the transparent conductive electrode, putting the induced template on the upper part of the elastic organic transparent polymer layer, and applying a voltage to make the Maxwell stress on the elastic organic transparent polymer layer overcome the flowing deformation of surface tension and viscous resistance until the replication process ends; and finally, preparing a layer of conductive polymer aqueous solution on the surface of the shaped elastic organic transparent polymer layer, carrying out heating to evaporate solvent, and forming a flexible conductive layer in the depressed part of the elastic polymer film layer. Organic unity of flexible structure, superior performance and simple process of a variable-focus micro lens array is realized.

Description

technical field [0001] The invention belongs to the technical field of zoom microlens arrays in micro-nano manufacturing, and in particular relates to a zoom microlens array structure and preparation process based on electric actuation. Background technique [0002] In the field of micro-nano optical technology, the zoom micro-lens array is an extremely important micro-optical component, which has many advantages such as adjustable optical performance, small size, light weight, no mechanical movement, and good stability. Fluid sensing, adaptive optics and many other fields have broad applications. The current zoom microlens arrays mainly include pressure-driven zoom microlenses, electrowetting zoom microlenses, thermal effect-based zoom microlenses, and liquid crystal adjustable zoom microlenses. To achieve the effect of adjusting the focal length. However, the existing zoom microlens arrays are difficult to achieve an organic combination in terms of structural flexibility...

AI Technical Summary

Problems solved by technology

However, the existing zoom microlens arrays are difficult to achieve an organic combination in terms of structural flexibility, performance superiority, and process simplicity: pressure-driven zoom microlenses can achieve a large focusing range, but there are slow response speeds and control unit structures. Complexity and other disadvantages; electrowetting driven zoom microlens has flexible structural design and a relatively large focal length adjustment range, but there are disadvantages such as difficulty in achieving a large aperture size, being greatly affected by the environment, and difficult to integrate; zoom microlenses based on thermal effects usually have low prices, Flexible structural design and other advantages, but there are disadvantages such as complex manufacturing process, slow response speed, and insufficient focus adjustment range; liquid crystal zoom microlens has fast adjustment speed, wide focus range, no surface deformation, good stability, and easy integration. Advantages, but its focus adjustment accuracy is not high enough, and there are still problems such as phase difference and chromatic aberration

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