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Device for plasma treatment of surfaces and method for treating surfaces with plasma

A technology of plasma and gas, applied in the bonding method of surface pretreatment, the device of coating liquid on the surface, plasma, etc., can solve the problems of material erosion and so on

Inactive Publication Date: 2019-08-09
TESA SE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Higher intensity treatments also lead to significant erosion of material

Method used

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  • Device for plasma treatment of surfaces and method for treating surfaces with plasma
  • Device for plasma treatment of surfaces and method for treating surfaces with plasma
  • Device for plasma treatment of surfaces and method for treating surfaces with plasma

Examples

Experimental program
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Embodiment Construction

[0049] A schematic representation of a device 1 according to the invention for the plasma treatment of a surface 2 is shown in figure 1 The first embodiment in has a first electrode 4 which is formed as a tube and forms the process gas channel 3 inside it. In this embodiment, the first electrode 4 coincides with its housing. During operation of the device, for each electrode or for each head of an electrode, the process gas is guided through the process gas channel 3 at a low flow volume of eg 10 l / min. In a flow direction aligned opposite to the direction of the height H, the process gas channel 3 ends in the outlet 5 .

[0050] exist figure 1 In , only the electrode tip 4a of the first electrode 4 is shown. The electrode tip 4 a is entirely manufactured from an electrically conductive material, such as high-grade steel, iron or copper alloy, and is connected to an alternating voltage source 6 . The alternating voltage source 6 generates an alternating or pulsed high volt...

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Abstract

The invention discloses a device for plasma treatment of surfaces and a method for treating surfaces with plasma. A device for plasma treatment of a surface (2) has a first electrode (4) and a second electrode (7) and an alternating voltage source ( 6), and at least the electric field formed between the first electrode (4) and the second electrode (7), the active area arranged in front of the first electrode (4) and in which the surface (2) to be treated can be located ( 9), and the second electrode (7) is arranged closer to the active area (9) than the first electrode (4), characterized in that the outlet with at least one outlet (5) arranged at the first electrode (4) At least one process gas channel (3) for at least one process gas stream, and the at least one outlet (5) is directed in the direction of the active area (9), and the at least one process gas stream impinges on an electric field and the electric field The at least one process gas stream is converted into a plasma stream and the plasma stream impinges on the active area (9).

Description

technical field [0001] The invention relates to a device for plasma treatment of surfaces having a first electrode and a second electrode and an alternating voltage source between the first electrode and the second electrode, and between the first electrode and the second electrode An electric field is formed and has an active area arranged in front of the first electrode and in which the surface to be treated can be located, the second electrode being arranged closer to the active area than the first electrode. [0002] The invention also relates to a method for treating a surface with a plasma, wherein an alternating voltage is applied between a first electrode and a second electrode, between which an alternating electric field is generated, the surface to be treated being located in front of the first electrode And the second electrode is arranged closer to the surface than the first electrode. Background technique [0003] When adhering surfaces one on top of the other ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/32
CPCH01J37/32532H01J37/32807H05H1/2406B29C59/14B05D3/144C09J5/02H01J37/3244H01J37/32541H01J37/32568H05H1/2431H05H1/2418H01J2237/3322H01J2237/336
Inventor M.黑内尔
Owner TESA SE
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