A kind of algainp semiconductor laser containing highly selective etching barrier layer

Abstract

The invention provides an AlGaInP semiconductor laser including a high-selective corrosion barrier layer. The AlGaInP semiconductor laser, from the bottom to the top, includes a substrate, a lower cladding, an active region, a first upper cladding, the corrosion barrier layer, a second upper cladding, and an ohmic contact layer. The A1GaInP semiconductor laser is characterized in that the corrosion barrier layer is a three-layer structure of (AlaGa1-a) 0.5In0.5P, GabIn1-bp, and (AlaGa1-a)0.5In0.5P from the bottom to the top, the thickness of each layer is in the range of 5-15nm, wherein a refers to 0.1-0.5, b refers to 0.5-0.7, the active region includes an (Al*Ga1-x)0.5In0.5P barrier layer, a GayIn1-yP quantum well, and an (Al*Ga1-x)0.5In0.5P barrier layer that are successively arranged from the bottom to the top, wherein x refers to 0.4-0.6, y refers to 0.4-0.6, and the values of b and y satisfy the condition of b>y. When the impurity induction quantum well mixing is carried out to form a non-absorption window, the corrosion barrier layer can reduce the mutual diffusion degree of Al and Ga atoms, so that the corrosion selectivity ratio of the corrosion barrier layer and the second upper cladding is improved. When a ridge-type waveguide structure is manufactured, the corrosion surface is flat, and the light output mode is stable.

Description

technical field [0001] The invention relates to an AlGaInP semiconductor laser containing a highly selective corrosion barrier layer, which belongs to the technical field of semiconductor lasers. Background technique [0002] AlGaInP visible light semiconductor lasers have the advantages of small size, long life, and high photoelectric conversion efficiency. They are gradually replacing traditional He-Ne gas lasers and ruby ​​solid-state lasers, and are widely used in optical disk reading and writing systems, barcode readers, and alignment markers. , medical care equipment and other fields. In addition, it is also a red light source for laser display devices such as laser TVs and portable projectors. These applications require the laser to maintain a stable optical mode and laser power output, and have high requirements on the life and reliability of the laser. [0003] The active region of the semiconductor laser is thin, and there is a difference in refractive index with...

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Problems solved by technology

However, when the quantum well is mixed, the corrosion barrier layer will also have atomic mixing, so that the Ga element in the corrosion barrier layer will decrease, the Al element will increase, and the corrosion selectivity will decrease.

like Figure 2a As shown, in the process of ridge fabrication, there will be a phenomenon that the etching depth of the device window area and the gain area are inconsistent, resulting in a difference in refractive index and a change in the output light mode.

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