Laser differential confocal LIBS, Raman spectrum-mass spectrum imaging method and Raman spectrum-mass spectrum imaging device

Abstract

The invention relates to a laser differential confocal LIBS, a Raman spectrum-mass spectrum imaging method and a Raman spectrum-mass spectrum imaging device and belongs to the technical fields of confocal microscopy imaging, mass spectrum imaging and spectral measurement. In the invention, the differential confocal microscopy imaging technology is combined with a spectrum and mass spectrum detection technology; a high-spatial-discrimination differential confocal system is used for axially focusing and imaging a sample; a mass spectrum detection system is used for performing mass spectrum detection to charged molecules and atoms in a sample microcell; and a spectral detection system is used for performing microcell spectrum detection to focal spot excitation spectrums (Raman spectrum and induced breakdown spectrum) of a differential confocal microscopy system, thereby achieving high-spatial discrimination and high-sensitivity imaging and detection of complete component information and configuration parameters of the sample microcell. The invention achieves advantage complement and structure and function fusion of laser poly-spectrum component imaging detection (mass spectrum, Raman spectrum and laser-induced breakdown spectrum). The method and the device have wide application prospect in the fields of biology, physical chemistry, micro-fabrication and nano-fabrication and the like.

Description

technical field [0001] The invention belongs to the field of differential confocal microscopic imaging technology, spectral imaging technology and mass spectrometric imaging technology, and combines laser differential confocal microscopic imaging technology, laser induced breakdown spectral imaging technology, Raman spectral imaging technology and mass spectrometric imaging technology, and relates to a A high-spatial-resolution laser differential confocal-induced breakdown, Raman spectroscopy-mass spectroscopy microscopic imaging method and device have broad application prospects in the fields of biology, materials, minerals, and micro-nano manufacturing. technical background [0002] Mass spectrometry (Mass Spectrometry) is to ionize the components in the sample, so that the generated charged atoms, molecules or molecular fragments with different charge-to-mass ratios are respectively focused under the action of electric field and magnetic field to obtain a spectrum arranged...

AI Technical Summary

Problems solved by technology

[0005] 1) Due to the use of simple laser focusing to desorb and ionize the sample, there are still problems such as large laser focusing spot and low spatial resolution of mass spectrometry detection;

[0006] 2) It is impossible to detect neutral atoms, molecules, neutral ions and groups, etc., which restricts the accurate and complete acquisition of sample component information;

[0007] 3) The time required for mass spectrometry imaging is long, and the axial position of the focused spot of the laser mass spectrometer often drifts relative to the sample to be measured

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