A preparation method of a micron-scale sheet transmission electron microscope section sample

An electron microscope, micron-scale technology, applied in the preparation of test samples, etc., can solve the problems of limited application, high cost of sample preparation, easy damage to samples, etc., and achieves simple operation process, strong practicability, and sample preparation success rate. high effect

Inactive Publication Date: 2017-09-19
PEKING UNIV
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Problems solved by technology

For the TEM cross-section samples of micron-scale flakes, in the existing technical preparation methods, the focused ion beam FIB method is usually used, which has high precision, fast sample preparation speed, and high yield; but the equipment is expensive and sample preparation is difficult. The cost is high, and the strong ion beam accelerated by high pressure is easy to damage the sample, which limits its wide application in general TEM laboratory sample preparation

Method used

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  • A preparation method of a micron-scale sheet transmission electron microscope section sample
  • A preparation method of a micron-scale sheet transmission electron microscope section sample
  • A preparation method of a micron-scale sheet transmission electron microscope section sample

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Embodiment Construction

[0029] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.

[0030] The preparation method of the micron-scale flake transmission electron microscope section sample of the present embodiment, such as Image 6 shown, including the following steps:

[0031] 1) Preparation of rectangular sample strips and cured sample sheets:

[0032] First cut the micron-scale flake sample from the plane direction into strips with a width b of 3 mm and a length a of 10 to 15 mm to form a rectangular sample strip 1, such as figure 1 As shown, the cured sample sheet 3 for bonding and curing is cut into the same size as the rectangular sample strip, and the cured sample sheet 3 is made of silicon, and then the surface of the rectangular sample strip and the cured sample sheet is cleaned with alcohol or acetone to remove Remove surface stains, then dry naturally for later use;

[0033] 2) Adhesive curing sample sheet:

[00...

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Abstract

The invention discloses a method for preparing a section sample of a micron-scale sheet transmission electron microscope. In the present invention, the micron-scale thin slice sample is first cut into rectangular sample strips and clamped in the solidified sample sheet to form a block sample, and then cut into a cross-sectional sample thin slice, a sample holder is attached to the surface of a cross-sectional direction, and the two surfaces are manually ground. The other surface is bonded to the support ring by a curing adhesive, and then heated to remove the sample holder, and at the same time the support ring is cured and bonded to the cross-section sample sheet, and then the sample is trimmed, and finally ion thinning is carried out to obtain a TEM cross-section sample; the preparation of the present invention The method has the advantages of simple operation process, mature sample preparation equipment and technology, high sample preparation success rate, strong practicability, and is suitable for the preparation of various micron-scale flake-shaped TEM cross-sectional samples.

Description

technical field [0001] The invention relates to electron microscope sample preparation technology, in particular to a method for preparing a micron-scale sheet transmission electron microscope section sample. Background technique [0002] At present, in the field of transmission electron microscope TEM testing technology, due to the relatively low penetration ability of electron beams, the thickness of samples used for TEM analysis is required to be very thin, generally less than 100 nm. In addition, only samples with an outer diameter of 3mm can be placed in the TEM sample holder. Therefore, the samples that need to be tested and analyzed by TEM must be processed to prepare samples suitable for TEM observation. If a thin and non-damaged sample for observation cannot be prepared, no advanced TEM can do anything. Therefore, TEM sample preparation plays a very important role in transmission electron microscopy research. [0003] For bulk materials, TEM samples mainly includ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/28
Inventor 马秀梅尤力平徐军俞大鹏
Owner PEKING UNIV
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