Method for flexibly online preparing micro line group electrode

Abstract

The invention discloses a method for flexibly online preparing a micro line group electrode and belongs to the field of electrochemistry micro manufacturing. The method is characterized by comprising the following steps that firstly, a metal sheet and the line group electrode are fixed in a workpiece clamp and a line group electrode clamp respectively and are connected with the positive electrode and the negative electrode of an ultrashort pulse power source respectively to achieve flexible preparing of a cathode tool, the cathode tool is composed of hair cracks and cathode holes corresponding to electrode wires in the line group electrode, and after machining is over, the electrode wires are located in the centers of the cathode holes; secondly, the cathode tool and the line group electrode are connected with the positive electrode and the negative electrode of the ultrashort pulse power source respectively, and axial reciprocating movement of the line group electrode is used for achieving online preparing of the submicron line group electrode; thirdly, the electrode wires exit from the cathode tool along the hair cracks, and then the cathode tool is replaced by a workpiece to be machined; the line group electrode and the workpiece are connected with the negative electrode and the positive electrode of the ultrashort pulse power source respectively and conduct micro electrolytic line cutting machining of the multi-line electrode.

Description

technical field [0001] The invention relates to a method for flexible on-line preparation of micro-group wire electrodes, which belongs to the field of electrochemical micro-manufacturing. technical background [0002] Arrayed micro-slits are a type of structure often involved in many high-tech products, such as: X-ray grating differential phase contrast imaging grating, special grating for deep space exploration and integrated circuit lead frame stamping carbide progressive die, etc. This type of structure is generally formed by regular arrangement of straight slits with a slit width of several microns to hundreds of microns. Due to the large quantity, the processing precision and surface quality are high, and in order to meet the use requirements, some special difficult-to-machine materials are needed, such as heavy metals with high Z elements (Au, W, Ta, etc.), titanium alloys and hard alloys, etc. , so processing and manufacturing is difficult, and sometimes even become...

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Problems solved by technology

[0004] The present invention proposes a method for flexible on-line preparation of micro-wire electrodes, the principle of which is to continuously complete the preparation of cathode tools, the preparation of submicron group wire electrodes and the subsequent processing in the same process system, so as to realize the production of group wire electrodes. Flexible preparation, while solving the difficulties in the manufacture of cathode tools with small pitch size and the difficulty in ensuring the installation and positioning errors of cathode tools

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