Flexible online method for preparing micro-group wire electrodes

Abstract

The invention discloses a method for flexible on-line preparation of micro-group wire electrodes, which belongs to the field of electrochemical micro-manufacturing. It is characterized in that it includes the following process: 1. Fix a metal sheet and the group wire electrode in the workpiece fixture and the group wire electrode fixture respectively, and respectively connect with the positive pole and the negative pole of the ultrashort pulse power supply, so as to realize the flexible preparation of the cathode tool ; The cathode tool is composed of micro-slits and cathode holes corresponding to each electrode wire in the group wire electrode; after processing, the electrode wire is located at the center of the cathode hole; 2, the cathode tool and the group wire electrode are respectively connected to an ultrashort pulse power supply Using the axial reciprocating movement of the wire electrode, the online preparation of the submicron group wire electrode is realized; 3. The electrode wire "exits" the cathode tool along the micro-slit, and then replaces the cathode tool with the workpiece to be processed; The wire electrode and the workpiece are respectively connected to the negative pole and the positive pole of the ultrashort pulse power supply, and the multi-wire electrode micro-electrolytic wire cutting process is performed.

Description

technical field [0001] The invention relates to a method for flexible on-line preparation of micro-group wire electrodes, which belongs to the field of electrochemical micro-manufacturing. technical background [0002] Arrayed micro-slits are a type of structure often involved in many high-tech products, such as: X-ray grating differential phase contrast imaging grating, special grating for deep space exploration and integrated circuit lead frame stamping carbide progressive die, etc. This type of structure is generally formed by regular arrangement of straight slits with a slit width of several microns to hundreds of microns. Due to the large quantity, the processing precision and surface quality are high, and in order to meet the use requirements, some special difficult-to-machine materials are needed, such as heavy metals with high Z elements (Au, W, Ta, etc.), titanium alloys and hard alloys, etc. , so processing and manufacturing is difficult, and sometimes even become...

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Problems solved by technology

[0004] The present invention proposes a method for flexible on-line preparation of micro-wire electrodes, the principle of which is to continuously complete the preparation of cathode tools, the preparation of submicron group wire electrodes and the subsequent processing in the same process system, so as to realize the production of group wire electrodes. Flexible preparation, while solving the difficulties in the manufacture of cathode tools with small pitch size and the difficulty in ensuring the installation and positioning errors of cathode tools

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