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A kind of preparation method of ni50mn34in12co4 alloy film with high flatness

A technology of alloy thin film and flatness, applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of large roughness, composition deviation from target, etc., achieve strong anisotropy and simple preparation process , the effect of precise composition

Active Publication Date: 2018-03-20
DALIAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention provides a high flatness Ni 50 mn 34 In 12 co 4 Preparation method of alloy thin film

Method used

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  • A kind of preparation method of ni50mn34in12co4 alloy film with high flatness
  • A kind of preparation method of ni50mn34in12co4 alloy film with high flatness
  • A kind of preparation method of ni50mn34in12co4 alloy film with high flatness

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Experimental program
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Effect test

Embodiment 1

[0022] The test alloy targets were selected from four metal elements with a purity of 99.99at.%-Ni, 99.95at.%-Mn, 99.99at.%-In, and 99.95at.%-Co. According to the molar ratio, 50 parts of Ni, 34 parts of Mn, 12 parts of In and 4 parts of Co are placed in a vacuum non-consumable electrode electric arc furnace. Before melting, the furnace cavity is evacuated to a degree of 5×10 -3 Pa, filled with Ar protective gas. In order to make the composition of the material uniform, the material is turned over by a manipulator before each smelting, and the smelting is turned over at least 4 times, and magnetic stirring is added during the smelting process. After smelting, an ingot with a diameter of 50 mm was obtained. After being ground on the grinding wheel, the ingot was placed on a wire electric discharge machine and cut into a circular target with a diameter of 3mm×2mm. Quartz glass with a specification of 30mm×30mm×3mm is selected as the substrate of the thin film. Pretreatment of...

Embodiment 2

[0024] The test alloy targets were selected from four metal elements with a purity of 99.99at.%-Ni, 99.95at.%-Mn, 99.99at.%-In, and 99.95at.%-Co. According to the molar ratio, 50 parts of Ni, 34 parts of Mn, 12 parts of In and 4 parts of Co are placed in a vacuum non-consumable electrode electric arc furnace. Before melting, the furnace cavity is evacuated to a degree of 5×10 -3Pa, filled with Ar protective gas. In order to make the composition of the material uniform, the material is turned over by a manipulator before each smelting, and the smelting is turned over at least 4 times, and magnetic stirring is added during the smelting process. After smelting, an ingot with a diameter of 50 mm was obtained. After being ground on the grinding wheel, the ingot was placed on a wire electric discharge machine and cut into a circular target with a diameter of 3mm×2mm. Quartz glass with a specification of 30mm×30mm×3mm is selected as the substrate of the thin film. Pretreatment of ...

Embodiment 3

[0026] The test alloy targets were selected from four metal elements with a purity of 99.99at.%-Ni, 99.95at.%-Mn, 99.99at.%-In, and 99.95at.%-Co. According to the molar ratio, 50 parts of Ni, 34 parts of Mn, 12 parts of In and 4 parts of Co are placed in a vacuum non-consumable electrode electric arc furnace. Before melting, the furnace cavity is evacuated to a degree of 5×10 -3 Pa, filled with Ar protective gas. In order to make the composition of the material uniform, the material is turned over by a manipulator before each smelting, and the smelting is turned over at least 4 times, and magnetic stirring is added during the smelting process. After smelting, an ingot with a diameter of 50 mm was obtained. After being ground on the grinding wheel, the ingot was placed on a wire electric discharge machine and cut into a circular target with a diameter of 3mm×2mm. Quartz glass with a specification of 30mm×30mm×3mm is selected as the substrate of the thin film. Perform pretrea...

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Abstract

The invention relates to a preparation method of a Ni50Mn34In12Co4 alloy thin film with high flatness. It includes the following steps: respectively taking Ni, Mn, In, and Co metal elements according to the mole fraction ratio of 50:34:12:4 and placing them in a vacuum non-consumable electrode electric arc furnace for smelting; vacuuming the electric arc furnace to 5×10 ‑3Pa, fill with protective gas to obtain a circular target; place the processed substrate and target in a vacuum system, evacuate to 1.0×10‑4Pa, and the distance between the substrate and the target is 3-5cm; then use a laser The laser was emitted, the frequency was controlled at 3-4 Hz, and the film was sputtered for 1-3 hours to obtain a thin film with the required thickness; finally, after annealing at 800-900 °C for 0.5-3 h, a high-flatness Ni50Mn34In12Co4 ferromagnetic shape memory alloy film was prepared. The Ni50Mn34In12Co4 alloy thin film prepared by the invention has more accurate composition, lower roughness and strong anisotropy; the alloy thin film has good toughness, high strength, simple preparation process, easy industrial production, and has important practicality for micro-intelligence and high integration. value.

Description

technical field [0001] The invention belongs to the technical field of metal alloys, and relates to a Ni alloy with high flatness 50 mn 34 In 12 co 4 Alloy film preparation method. Background technique [0002] Ni-Co-Mn-In single crystal can undergo martensitic reverse phase transformation under the action of a magnetic field, which can completely restore the 3% pre-compression strain. The theoretical output stress in this process can reach 108 MPa, which is higher than that of Ni-Mn- The output stress of Ga is two orders of magnitude higher, and this research brings a huge step towards the practical application of magnetically actuated shape memory alloys. However, the complex preparation process and high cost of single crystal materials limit their wide application to a certain extent. However, the Ni-Mn-Co-In polycrystalline grains have different grain orientations, and there is strain coordination between adjacent grains, so the maximum reversible strain in the shap...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/18
Inventor 董桂馥
Owner DALIAN UNIV
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