Cross-coupled oscillator using gallium nitride-based clamped beam switches with low leakage current, and preparation method of cross-coupled oscillator
A switching cross-coupling, GaN-based technology, applied in power oscillators, coupling of optical waveguides, semiconductor/solid-state device components, etc., can solve problems such as the impact of chip performance, and achieve reduced power consumption and high electron mobility , the effect of gate leakage current reduction
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[0043] The fixed beam switch MESFET cross-coupled oscillator of the present invention is composed of a first fixed beam switch MESFET and a second fixed beam switch MESFET, an LC resonant circuit, and a constant current source. The MESFET of the cross-coupled oscillator is based on a GaN substrate The bottom 3 is made, and its input lead 4 is made of gold. The gate 5 of the MESFET in the present invention forms a Schottky contact with the active layer, and a fixed support beam 6 is designed above the gate 5 . The two anchor regions 7 of the anchor beam 6 are fabricated on the semi-insulating GaN substrate 3 . Two electrode plates 8 are designed under each fixed support beam 6 , and the top of the electrode plates is covered with a silicon nitride layer 9 . The electrode plate 8 of each MESFET is grounded.
[0044] The cross-coupled oscillator of the present invention is based on a GaN substrate, and a fixed beam structure is designed above the gate of the MESFET in the oscil...
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