A method for controlling the process of changing stages in a double-workpiece stage system

Abstract

The invention discloses a method for controlling the table change process of a dual-workpiece table system and belongs to the technical field of semiconductor manufacturing equipment. The method comprises the following steps: a first workpiece table moves to the pretreatment operation position at the left side; a second workpiece table moves to an exposure operation position at the right side; a first X-direction moving platform moves to a card change position at the left side, and a second X-direction moving platform moves to a card change position at the right side; a revolution motor drives the first workpiece table and the second workpiece table to rotate anticlockwise for 180 degrees; the second workpiece table moves to the pretreatment operation position at the left side; the first workpiece table moves to the exposure operation position at the right side; the revolution motor drives the first workpiece table and the second workpiece table to rotate clockwise for 180 degrees. According to the method disclosed by the invention, a rotation table change scheme is adopted, and compared with a linear table change scheme, the scheme has the advantages that the impact on table bodies in the table change process is reduced, the table change time is shortened, the positioning precision of the workpiece table is enhanced, and a crucial effect is taken for the productivity increase of photoetching machines.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment. Background technique [0002] The rapid development of modern science and technology has put forward higher and higher requirements for the manufacturing capacity of VLSI. Chips are becoming more and more refined and the integration level is getting higher and higher. It is an inevitable trend in the development of integrated circuits. As a very large-scale circuit manufacturing equipment, lithography machines are currently mainly monopolized by developed countries such as Europe and the United States. my country's cutting-edge chips still rely on imports, which seriously restricts my country's development in aviation, aerospace, ships, electric power and other fields. In order to break the monopoly and improve my country's integrated circuit manufacturing capacity, my country has listed the development of scanning lithography equipment as a major national science an...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a method for controlling the changing process of a double work table system, which is to solve the problem that the existing double work table technology adopts a linear table changing scheme, the positioning accuracy of the work table is low, and the table change process has an impact on the table body. bigger problem

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