Micro spring cantilever beam micro heater with soaking plate and preparation technology thereof

Abstract

The invention discloses a micro spring cantilever beam micro heater with soaking plate which comprises a silicon base, an insulation film, a heating unit and a soaking plate, wherein a through hole is formed in the middle of the silicon base, the insulation film covers on the base and the through hole and the insulation film covers a cantilever beam; the heating unit comprises a heating wire and an electrode, the heating wire is arranged on the cantilever beam, and the electrode is arranged on the insulation film; the soaking plate is arranged in the through hole and is connected below the cantilever beam. A preparation technology is also provided. The cantilever beam is adopted for reducing heat conduction heat dissipation of the micro heater; a composite insulation film is adopted for compensating the stress and increasing structure stability of the cantilever beam; the micro spring is adopted for releasing intrinsic stress of the composite membrane and thermal expansion stress generated when the micro heater works; the soaking plate is adopted for greatly improving temperature uniformity of reaction region and improving reaction precision; silicon base MEMS technology is adopted for having perfect compatibility with large scale integrated circuit technology and is suitable for mass production.

Description

technical field [0001] The invention relates to a micro heater, in particular to a micro spring type cantilever beam micro heater with a soaking plate and a preparation process thereof. Background technique [0002] As a surface sensor based on MEMS technology, it has been widely used in polymerase reaction chip heaters, infrared light sources in infrared analysis systems, gas detection under extreme conditions, and indoor formaldehyde gas syndrome prevention. How to obtain a uniformly distributed temperature over a large area with a certain power consumption is an important criterion for measuring the performance of a micro-heater. [0003] At present, most of the surface micro heaters control the spatial layout of the heating wires in order to obtain a high-quality uniform temperature area. The way the small middle area releases heat. This method limits the miniaturization of the micro-heater due to the consideration of the spatial layout of the heating wire; or the heat...

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Problems solved by technology

[0004] In order to solve the problem of no stress release of the above-mentioned cantilever beam and uneven temperature of the reaction unit, the present invention provides a micro-spring-type cantilever beam with a vapor chamber micro-heater and its preparation process. In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme :

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